Electrostatic Aerosol Deposition Method for the Formation of an Ensemble of Monodisperse Particles on a Substrate

Abstract:

We have developed an aerosol-based technique for deposition of monodisperse ensembles of spherical SiO₂ nanoparticles on the surface of single-crystal silicon substrate (1 cm²) with an average surface particle density of about 2.1±0.4 particles per μm². The obtained samples of monodisperse ensembles SiO₂ nanoparticles was characterized by scanning and transmission electron microscopy. The ensemble of deposited nanoparticles is characterized by a narrow size distribution with a modal size of 26.6 nm and a full width at half maximum of 3.5 nm according to the atomic force microscopy data. We have demonstrated the use of the obtained test structure to determine the effective radius of the tip of an atomic force microscope.

• Periodical: Journal of Nano Research (Volume 41)
• Pages: 53-62
• DOI: https://doi.org/10.4028/www.scientific.net/JNanoR.41.53
• Online since: May 2016
• Authors: Alexey A. Efimov*, Anna A. Lizunova, Elena G. Kalinina, Valentin S. Sukharev, Victor V. Ivanov
• Keywords: Aerosol Nanoparticles, Atomic-Force Microscope, Electrostatic Deposition, Monodisperse Particles, Radius of the Probe Tip

References

[1] K.L. Kelly, E. Coronado, L.L. Zhao, G.C. Schatz, The Optical Properties of Metal Nanoparticles:  The Influence of Size, Shape, and Dielectric Environment, J. Phys. Chem. B, 107 (2003) 668–677.

DOI: 10.1021/jp026731y

[2] H. Tanaka, L. Hong, M. Fukumori, R. Negishi, Y. Kobayashi, D. Tanaka, T. Ogawa, Influence of nanoparticle size to the electrical properties of naphthalenediimide on single-walled carbon nanotube wiring, Nanotechnology, 23 (2012) 215701.

DOI: 10.1088/0957-4484/23/21/215701

[3] A. Demortière, P. Panissod, B.P. Pichon, G. Pourroy, D. Guillon, B. Donnio, S. Bégin-Colin, Size-dependent properties of magnetic iron oxide nanocrystals, Nanoscale, 3 (2011) 225–232.

DOI: 10.1039/c0nr00521e

[4] Z. Xu, F. -S. Xiao, S.K. Purnell, O. Alexeev, S. Kawi, S.E. Deutsch, B.C. Gates, Size-dependent catalytic activity of supported metal clusters, Nature, 372 (1994) 346–348.

DOI: 10.1038/372346a0

[5] S. Shoji, S. Nakanishi, T. Hamano, S. Kawata, Size-Dependent Mechanical Properties of Polymer-nanowires Fabricated by Two-photon Lithography, in: Symp. FFGG – Mech. Behav. Small Scales — Exp. Model., (2009).

DOI: 10.1557/proc-1224-ff06-05-dd06-05

[6] G.W. Mulholland, N.P. Bryner, C. Croarkin, Measurement of the 100 nm NIST SRM 1963 by Differential Mobility Analysis, Aerosol Sci. Technol., 31 (1999) 39–55.

DOI: 10.1080/027868299304345

[7] J. Dixkens, H. Fissan, Development of an Electrostatic Precipitator for Off-Line Particle Analysis, Aerosol Sci. Technol., 30 (1999) 438–453.

DOI: 10.1080/027868299304480

[8] T.J. Krinke, K. Deppert, M.H. Magnusson, F. Schmidt, H. Fissan, Microscopic aspects of the deposition of nanoparticles from the gas phase, J. Aerosol Sci., 33 (2002) 1341–1359.

DOI: 10.1016/s0021-8502(02)00074-5

[9] S. -J. Yook, H. Fissan, T. Engelke, C. Asbach, T. van der Zwaag, J.H. Kim, J. Wang, D.Y.H. Pui, Classification of highly monodisperse nanoparticles of NIST-traceable sizes by TDMA and control of deposition spot size on a surface by electrophoresis, J. Aerosol Sci., 39 (2008).

DOI: 10.1016/j.jaerosci.2008.03.001

[10] H. Fissan, M.K. Kennedy, T.J. Krinke, F.E. Kruis, Nanoparticles from the Gas Phase as Building Blocks for Electrical Devices, J. Nanoparticle Res., 5 (2003) 299–310.

DOI: 10.1023/a:1025511014757

[11] N.A. Fuchs, On the stationary charge distribution on aerosol particles in a bipolar ionic atmosphere, Geofis. Pura E Appl., 56 (1963) 185–193.

DOI: 10.1007/bf01993343

[12] D. Hummes, S. Neumann, F. Schmidt, M. Drouml tboom, H. Fissan, K. deppert, T. Junno, J. Malm, L. Samuelson, Determination of the Size Distribution of Nanometer-Sized Particles, J. Aerosol Sci., 27 (1996) 163–164.

DOI: 10.1016/0021-8502(96)00154-1

[13] A.T. Winzer, C. Kraft, S. Bhushan, V. Stepanenko, I. Tessmer, Correcting for AFM tip induced topography convolutions in protein–DNA samples, Ultramicroscopy, 121 (2012) 8–15.

DOI: 10.1016/j.ultramic.2012.07.002

[14] S.G. Rautian, REAL SPECTRAL APPARATUS, Sov. Phys. Uspekhi, 1 (1958) 245–273.

DOI: 10.1070/pu1958v001n02abeh003099

[15] A.A. Bukharaev, N.V. Berdunov, D.V. Ovchinnikov, K.M. Salikhov, Atomic force microscopy for metrology of micro- and nanostructures, Russ. Microelectron., 26 (1997) 137–148.

[16] J.E. Griffith, D.A. Grigg, Dimensional metrology with scanning probe microscopes, J. Appl. Phys., 74 (1993) R83–R109.

DOI: 10.1063/1.354175

[17] D.L. Sedin, K.L. Rowlen, Influence of tip size on AFM roughness measurements, Appl. Surf. Sci., 182 (2001) 40–48.

DOI: 10.1016/s0169-4332(01)00432-9

[18] Z. Zeng, G. Zhu, Z. Guo, L. Zhang, X. Yan, Q. Du, R. Liu, A simple method for AFM tip characterization by polystyrene spheres, Ultramicroscopy, 108 (2008) 975–980.

DOI: 10.1016/j.ultramic.2008.04.001

[19] S. Xu, M.F. Arnsdorf, Calibration of the scanning (atomic) force microscope with gold particles, J. Microsc., 173 (1994) 199–210.

DOI: 10.1111/j.1365-2818.1994.tb03442.x

[20] Y. Wang, X. Chen, Carbon nanotubes: A promising standard for quantitative evaluation of AFM tip apex geometry, Ultramicroscopy, 107 (2007) 293–298.

DOI: 10.1016/j.ultramic.2006.08.004

[21] F. Zenhausern, M. Adrian, B.T. Heggeler-Bordier, L.M. Eng, P. Descouts, DNA and RNA polymerase/DNA complex imaged by scanning force microscopy: Influence of molecular-scale friction, Scanning, 14 (1992) 212–217.

DOI: 10.1002/sca.4950140405

[22] D. Keller, Reconstruction of STM and AFM images distorted by finite-size tips, Surf. Sci., 253 (1991) 353–364.

DOI: 10.1016/0039-6028(91)90606-s

[23] C. Odin, J.P. Aimé, Z. El Kaakour, T. Bouhacina, Tip's finite size effects on atomic force microscopy in the contact mode: simple geometrical considerations for rapid estimation of apex radius and tip angle based on the study of polystyrene latex balls, Surf. Sci., 317 (1994).

DOI: 10.1016/0039-6028(94)90288-7

[24] V.J. Garcia, L. Martinez, J.M. Briceno-Valero, C.H. Schilling, Dimensional metrology of nanometric spherical particles using AFM: I, model development, Probe Microsc., 1 (1997) 107–116.