Preparation on ZnO film by Atomic Layer Deposition

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Periodical:

Key Engineering Materials (Volumes 169-170)

Edited by:

N. Mizutani, K. Shinozaki, N. Kamehara, T. Kimura

Pages:

159-162

DOI:

10.4028/www.scientific.net/KEM.169-170.159

Citation:

K. Kobayashi et al., "Preparation on ZnO film by Atomic Layer Deposition", Key Engineering Materials, Vols. 169-170, pp. 159-162, 1999

Online since:

June 1999

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Price:

$35.00

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