Formation of SiC Thin Films by Ion Beam Irradiation

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Periodical:

Key Engineering Materials (Volumes 169-170)

Edited by:

N. Mizutani, K. Shinozaki, N. Kamehara, T. Kimura

Pages:

179-182

DOI:

10.4028/www.scientific.net/KEM.169-170.179

Citation:

S. Hishita et al., "Formation of SiC Thin Films by Ion Beam Irradiation", Key Engineering Materials, Vols. 169-170, pp. 179-182, 1999

Online since:

June 1999

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Price:

$35.00

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