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HomeKey Engineering MaterialsKey Engineering Materials Vols. 169-170Formation of SiC Thin Films by Ion Beam...

Formation of SiC Thin Films by Ion Beam Irradiation

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Electroceramics in Japan II

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Periodical:

Key Engineering Materials (Volumes 169-170)

Pages:

179-182

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.169-170.179

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Online since:

June 1999

Authors:

Shunichi Hishita, K. Oyoshi, S. Suehara, Tatsuhiko Aizawa

Keywords:

Carbon Thin Film, Ion Beam Induced Chemical Reaction, Ion Beam Induced Epitaxial Growth, Silicon Carbide (SiC)

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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