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Key Engineering Materials Vols. 270-273

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.270-273

ToC:

Table of Contents

Paper Title Page

Design of Vertical Type Thermal CVD Reactor with Rotating-Disk for New Generation Semiconductor Processes
Authors: Hee Joon Kim, Akira Yoshida, Seong Bong Lee, Kwang Sun Kim
860
Fabrication of Nano-Structure by STM Tip Induced Atomic Diffusion
Authors: Joo Young Kim, Mitsuteru Inoue, Hironaga Uchida, Hee Joon Kim
866
Characterization of Heating Elements with Cobalt Silicide Films for Inkjet Printer
Authors: Ho Jung Chang, Young Kyu Noh, Hee Joon Kim, Akira Yoshida
872
Transparent Conducting ZnO Films on Polymer Substrates by Pulsed Laser Deposition
Authors: Kwang Jong Suh, Hiroshi Okada, Akihiro Wakahara, Ho Jung Chang, Hee Joon Kim, Akira Yoshida
878
Diagnosis and Reduction of Robot Arm Vibration for 12-Inch Wafer Spin Scrubber
Authors: Noh Yu Kim, Min Sung Hong
884
Effect of Al Composition on Luminescence Properties of Rare-Earth Implanted into AlGaN
Authors: Akira Yoshida, Akihiro Wakahara, Yasuo Nakanishi, Hiroshi Okada, Takeshi Ohshima, Hisayoshi Itoh, Young Tae Kim
890
Evaluation Method of NFR Sliders Using Modal Analysis and Instrumental Variable Method
Authors: Kyung Hwa Rim, Chae Hun An
895
The Special UTS for Ultra-High Temperature Measurement in the LaVa at SAC
Authors: Kil Mo Koo, Sang Bae Kim, Chi Seong Park, Soon Sin Hong, Sun Jin Kim
901
The Influences of the Wheel Profiles on the Wheel Wear of the Passenger Cars for the Same Bogie Type
Authors: Chan Woo Lee, Jae Chul Kim
907
Investigation of the Effect of Crack Closure Stress on Microwave Dual Frequency Technique for Evaluation of Small Cracks
Authors: Masumi Saka, Toru Miyadu, Yang Ju
913

Showing 141 to 150 of 386 Paper Titles

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