Polycrystalline Silicon Thin Films on SiC Substrates for Solar Cells

Hai Feng Li; Yong Huang; Zhi Jian Wan; Hou Xing Zhang; Li Ming Zhang; Y. Xu; Xiao Dong Li

doi:10.4028/www.scientific.net/KEM.280-283.1147

Paper Titles

Influence of Loading Conditions on Cyclic Compressive Fatigue Behavior of an Al₂O₃ Matrix Composite
p.1127

Manufacture and Properties of AlON-TiN Particulate Composites
p.1133

Study of the AlON-VN Composite Ceramic
p.1139

In Situ Reaction Synthesis of Porous Silica-Matrix Ceramics
p.1143

Polycrystalline Silicon Thin Films on SiC Substrates for Solar Cells
p.1147

Fabrication of Silica Colloidal Crystal Multilayer with Controlled Thicknesses by Vertical Deposition
p.1149

Preparation and Formation Mechanisms of Monodispersed Mesoporous SiO₂ Microspheres by the PICA Method
p.1153

Mullite Composite Phase Nanocrystalline from High-Silica Kaolin under Normal Pressure and Temperature: An Experimental Study
p.1157

Solar Cells from Thin Silicon Layers on AlN
p.1161

HomeKey Engineering MaterialsKey Engineering Materials Vols. 280-283Polycrystalline Silicon Thin Films on SiC...

Polycrystalline Silicon Thin Films on SiC Substrates for Solar Cells

Abstract:

The thin-film of silicon deposited by RTCVD on pressureless sintered SiC substrate with the size of 30mm×20mm, which is cleaned by ultrasonic method and chemical treatment. The crystal size of silicon columnar grain can reach 190 µm and its preferred orientation is [111] after ZMR process.