Electrophoretic Deposition of Pb(Zr,Ti)O3 Powders on Silicon Wafer and Sintering Densification Approach
Electrophoretic deposition (EPD) is a promising, simple and cost-effective method for fabrication of piezoelectric ceramic films. In this study, commercial lead zirconate titanate (PZT) powders were deposited onto silicon wafers coated with platinum electrodes by using EPD method in ethanol solution with a few amount of HCl to introduce surface charges to PZT particles. The sintering densification of the EPD-derived green PZT films were attempted with approaches: addition of a low-temperature eutectic sintering aid consists of Cu2O and PbO, infiltration of PZT sol into the green film. Thick PZT films on Si wafers were obtained by sintering at 700oC with sintering aid and sol-infiltration.
Wei Pan, Jianghong Gong, Chang-Chun Ge and Jing-Feng Li
N. Kang and J. F. Li, "Electrophoretic Deposition of Pb(Zr,Ti)O3 Powders on Silicon Wafer and Sintering Densification Approach", Key Engineering Materials, Vols. 280-283, pp. 1899-1902, 2005