Force-Calibrated AFM for Mechanical Test of Freestanding Thin Films

Abstract:

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Atomic force microscope (AFM) is a powerful tool for exploring a nano-scale world. It can measure a nano-scale surface topography with very high resolution and detect a very small force. In this paper, we propose a novel AFM cantilever and its calibration scheme to utilize AFM as a mechanical testing machine. We call this AFM with a new cantilever as a force-calibrated AFM. The feasibility of the AFM cantilever is validated through measurement of mechanical properties of freestanding Au thin films.

Info:

Periodical:

Key Engineering Materials (Volumes 297-300)

Edited by:

Young-Jin Kim, Dong-Ho Bae and Yun-Jae Kim

Pages:

275-279

DOI:

10.4028/www.scientific.net/KEM.297-300.275

Citation:

H. J. Lee et al., "Force-Calibrated AFM for Mechanical Test of Freestanding Thin Films ", Key Engineering Materials, Vols. 297-300, pp. 275-279, 2005

Online since:

November 2005

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Price:

$35.00

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