Force-Calibrated AFM for Mechanical Test of Freestanding Thin Films

Abstract:

Atomic force microscope (AFM) is a powerful tool for exploring a nano-scale world. It can measure a nano-scale surface topography with very high resolution and detect a very small force. In this paper, we propose a novel AFM cantilever and its calibration scheme to utilize AFM as a mechanical testing machine. We call this AFM with a new cantilever as a force-calibrated AFM. The feasibility of the AFM cantilever is validated through measurement of mechanical properties of freestanding Au thin films.

• Periodical: Key Engineering Materials (Volumes 297-300)
• Pages: 275-279
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.297-300.275
• Online since: November 2005
• Authors: Hak Joo Lee, Ki Ho Cho, Jae Hyun Kim, Seung Woo Han, Byung Ik Choi, Chang Wook Baek, Jong Man Kim, Sung Hoon Choa
• Keywords: Atomic Force Microscope (AFM), Au, Calibration, Cantilever, Freestanding Thin Film, Mechanical Testing

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