Preparation of Piezoelectric Thick Film Actuator by Screen Printing and Wet Etching
Piezoelectric actuators were prepared by the screen printing of piezoelectric thick films and the wet etching of Si substrates for the application of ink jet printer heads. The Pt bottom electrode was used as the vibration plate to obtain a large displacement. The layer structure and integration processes of the Pt bottom electrodes were investigated to be suited to the whole preparation process of the piezoelectric actuator. The displacement of the center of the actuator with 100 μｍ x mm was 0.03 μm at the applied voltage of 30 V and frequency of 4 kHz.
Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
T. Futakuchi et al., "Preparation of Piezoelectric Thick Film Actuator by Screen Printing and Wet Etching", Key Engineering Materials, Vol. 301, pp. 45-48, 2006