Preparation of Piezoelectric Thick Film Actuator by Screen Printing and Wet Etching

Tomoaki Futakuchi; Yuichi Sakai; Takashi Iijima; Masatoshi Adachi

doi:10.4028/www.scientific.net/KEM.301.45

Paper Titles

Size Effect of Dielectric Properties for Barium Titanate Particles and Its Model
p.27

Raman Piezo-Spectroscopic Investigation of Microscopic Residual Stresses in Ni-MLCC Devices
p.31

Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS
p.37

Preparation and Characterization of PZT Thin Films on ITO/Glass Substrate by CSD
p.41

Preparation of Piezoelectric Thick Film Actuator by Screen Printing and Wet Etching
p.45

Preparation and Characterization of Barium Strontium Titanate Thin Films by Chemical Solution Deposition
p.49

Dielectric and Piezoelectric Properties of Ba(Ti,Zr)O₃ Thin Films Consisted of Nano-Crystals
p.53

Synthesis and Properties of Nd-Substituted Bismuth Titanate Polycrystalline Thin Films with a-/b-Axes Orientation
p.57

Development of Lead-Free Piezoelectric Thick Films with a/b-Axis-Oriented Bi_4-xPr_xTi₃O₁₂
p.61

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Preparation of Piezoelectric Thick Film Actuator by Screen Printing and Wet Etching

Abstract:

Piezoelectric actuators were prepared by the screen printing of piezoelectric thick films and the wet etching of Si substrates for the application of ink jet printer heads. The Pt bottom electrode was used as the vibration plate to obtain a large displacement. The layer structure and integration processes of the Pt bottom electrodes were investigated to be suited to the whole preparation process of the piezoelectric actuator. The displacement of the center of the actuator with 100 μｍ x mm was 0.03 μm at the applied voltage of 30 V and frequency of 4 kHz.