Raman Piezo-Spectroscopic Investigation of Microscopic Residual Stresses in Ni-MLCC Devices

Tatsuo Sakashita; Kentaro Nakamura; Giuseppe Pezzotti; Hirokazu Chazono

doi:10.4028/www.scientific.net/KEM.301.31

Paper Titles

Electrical and Optical Properties of Potassium Niobate Grown by Vertical Bridgman Method
p.15

Processing and Electrical Properties of KNbO₃ Ferroelectric Dense Ceramics Added with Small Amount of Bi₂O₃ and MnCO₃
p.19

Enhanced Piezoelectric Properties of Barium Titanate Single Crystals by Domain Engineering
p.23

Size Effect of Dielectric Properties for Barium Titanate Particles and Its Model
p.27

Raman Piezo-Spectroscopic Investigation of Microscopic Residual Stresses in Ni-MLCC Devices
p.31

Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS
p.37

Preparation and Characterization of PZT Thin Films on ITO/Glass Substrate by CSD
p.41

Preparation of Piezoelectric Thick Film Actuator by Screen Printing and Wet Etching
p.45

Preparation and Characterization of Barium Strontium Titanate Thin Films by Chemical Solution Deposition
p.49

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Raman Piezo-Spectroscopic Investigation of Microscopic Residual Stresses in Ni-MLCC Devices

Abstract:

Residual stresses in Ni-MLCC were investigated by Raman microprobe piezo-spectroscopic (PS) methods. The shape of the Raman spectrum of BaTiO3 in Ni-MLCC depended on the angle between the polarizing direction of the incident laser beam and the direction of the internal electrode. From a set of precise calibrations, we show that the orientation dependence arises from the interaction between internal stresses and the polycrystalline microstructure; by taking into account such an orientation dependence, we were able to establish a technique for the measurement of the distribution of residual stresses in Ni-MLCC.