Preparation and Characterization of PZT Thin Films on ITO/Glass Substrate by CSD
This paper describes the deposition of PZT thin films on soda-lime glass substrate with ITO bottom electrode by CSD (Chemical Solution Deposition). The transmittance of the obtained PZT thin film on ITO/glass substrate was about 60 % in the visible light region. The deposited transparent PZT thin film exhibited the ferroelectricity of Pr=36.3 μC/cm2 and Ec=71.3 kV/cm. In addition, the piezoelectric property of the resultant PZT thin film was relatively large and exhibited the measured effective d33 of 120 pC/N after the polarization.
Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
T. Ohno et al., "Preparation and Characterization of PZT Thin Films on ITO/Glass Substrate by CSD", Key Engineering Materials, Vol. 301, pp. 41-44, 2006