Preparation and Characterization of PZT Thin Films on ITO/Glass Substrate by CSD

Tomoya Ohno; Masayuki Fujimoto; Hisao Suzuki

doi:10.4028/www.scientific.net/KEM.301.41

Paper Titles

Enhanced Piezoelectric Properties of Barium Titanate Single Crystals by Domain Engineering
p.23

Size Effect of Dielectric Properties for Barium Titanate Particles and Its Model
p.27

Raman Piezo-Spectroscopic Investigation of Microscopic Residual Stresses in Ni-MLCC Devices
p.31

Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS
p.37

Preparation and Characterization of PZT Thin Films on ITO/Glass Substrate by CSD
p.41

Preparation of Piezoelectric Thick Film Actuator by Screen Printing and Wet Etching
p.45

Preparation and Characterization of Barium Strontium Titanate Thin Films by Chemical Solution Deposition
p.49

Dielectric and Piezoelectric Properties of Ba(Ti,Zr)O₃ Thin Films Consisted of Nano-Crystals
p.53

Synthesis and Properties of Nd-Substituted Bismuth Titanate Polycrystalline Thin Films with a-/b-Axes Orientation
p.57

HomeKey Engineering MaterialsKey Engineering Materials Vol. 301Preparation and Characterization of PZT Thin Films...

Preparation and Characterization of PZT Thin Films on ITO/Glass Substrate by CSD

Abstract:

This paper describes the deposition of PZT thin films on soda-lime glass substrate with ITO bottom electrode by CSD (Chemical Solution Deposition). The transmittance of the obtained PZT thin film on ITO/glass substrate was about 60 % in the visible light region. The deposited transparent PZT thin film exhibited the ferroelectricity of Pr=36.3 μC/cm2 and Ec=71.3 kV/cm. In addition, the piezoelectric property of the resultant PZT thin film was relatively large and exhibited the measured effective d33 of 120 pC/N after the polarization.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Key Engineering Materials (Volume 301)

Pages:

41-44

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.301.41

Citation:

Cite this paper

Online since:

January 2006

Authors:

Tomoya Ohno, Masayuki Fujimoto, Hisao Suzuki

Keywords:

CSD, Electrical Properties, Glass Substrate, PZT Thin Film, Transparent Ferroelectric Thin Film

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] Desheng Fu, Kazuyuki Suzuki, Kazuki Kato and Hisao Suzuki, Appl. Phys. Let. 82(13) pp.2130-2132 (2003).

Google Scholar

[2] Koji Yamakawa, Keitaro Imai, Osamu Arisumi, Tsunetoshi Arikado, Masaki Yoshioka, Tatsushi Owada and Katsuya Okumura, Jpn. J. Appl. Phys., 41 pp.2630-2634, (2002).

DOI: 10.1143/jjap.41.2630

Google Scholar

[3] Katsunori Noritake, Takashi Matsukawa, Meishoku Koh, Ken-ichi Hara, Makoto Goto and Iwao Ohdomari, Jpn. J. Appl. Phys., 31 pp. L771-L773, (1992).

DOI: 10.1016/0168-583x(93)95550-o

Google Scholar

[4] Hisao Suzuki, Mohamed Baijuri Othman, Kenji Murakami, Shoji Kaneko and Takashi Hayashi, Jpn. J. Appl. Phys., 35 pp.4896-4899 (1996).

Google Scholar

[5] Desheng Fu, Hisao Suzuki, Takeshi Ogawa and Kenji Ishikawa, Appl. Phys. Lett., 80(13), pp.3572-3574 (2002) 1 10 100 200 400 600 loading unloading d33 (pC/N) Time (second).

Google Scholar