Dielectric and Piezoelectric Properties of Ba(Ti,Zr)O3 Thin Films Consisted of Nano-Crystals
Lead-free Ba(Ti1-xZrx)O3 (BTZ) thin films were fabricated on Pt(111)/Ti/SiO2/Si(100) substrates by the chemical solution deposition (CSD) process. The microstructure of the BTZ (x = 0.00 to 0.20) thin films was improved by additional sintering process, and their crystallite sizes were increased in each composition. The dielectric constant er and piezoelectric constant d33 of the BTZ thin films depended on the crystallite size. We give a guide for further investigation to improve the characteristics of BTZ thin films.
Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
K. Tanaka et al., "Dielectric and Piezoelectric Properties of Ba(Ti,Zr)O3 Thin Films Consisted of Nano-Crystals", Key Engineering Materials, Vol. 301, pp. 53-56, 2006