Dielectric and Piezoelectric Properties of Ba(Ti,Zr)O3 Thin Films Consisted of Nano-Crystals

Abstract:

Article Preview

Lead-free Ba(Ti1-xZrx)O3 (BTZ) thin films were fabricated on Pt(111)/Ti/SiO2/Si(100) substrates by the chemical solution deposition (CSD) process. The microstructure of the BTZ (x = 0.00 to 0.20) thin films was improved by additional sintering process, and their crystallite sizes were increased in each composition. The dielectric constant er and piezoelectric constant d33 of the BTZ thin films depended on the crystallite size. We give a guide for further investigation to improve the characteristics of BTZ thin films.

Info:

Periodical:

Edited by:

Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki

Pages:

53-56

DOI:

10.4028/www.scientific.net/KEM.301.53

Citation:

K. Tanaka et al., "Dielectric and Piezoelectric Properties of Ba(Ti,Zr)O3 Thin Films Consisted of Nano-Crystals", Key Engineering Materials, Vol. 301, pp. 53-56, 2006

Online since:

January 2006

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.