Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS

Takeshi Kobayashi; Jiunnjye Tsaur; Masaaki Ichiki; Ryutaro Maeda

doi:10.4028/www.scientific.net/KEM.301.37

Paper Titles

Processing and Electrical Properties of KNbO₃ Ferroelectric Dense Ceramics Added with Small Amount of Bi₂O₃ and MnCO₃
p.19

Enhanced Piezoelectric Properties of Barium Titanate Single Crystals by Domain Engineering
p.23

Size Effect of Dielectric Properties for Barium Titanate Particles and Its Model
p.27

Raman Piezo-Spectroscopic Investigation of Microscopic Residual Stresses in Ni-MLCC Devices
p.31

Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS
p.37

Preparation and Characterization of PZT Thin Films on ITO/Glass Substrate by CSD
p.41

Preparation of Piezoelectric Thick Film Actuator by Screen Printing and Wet Etching
p.45

Preparation and Characterization of Barium Strontium Titanate Thin Films by Chemical Solution Deposition
p.49

Dielectric and Piezoelectric Properties of Ba(Ti,Zr)O₃ Thin Films Consisted of Nano-Crystals
p.53

HomeKey Engineering MaterialsKey Engineering Materials Vol. 301Fabrication of Flat PZT Cantilevers through MEMS...

Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS

Abstract:

Flat PZT cantilevers have been successfully fabricated from the Pt/Ti/PZT/Pt/Ti/SiO2/SOI multi-layered structure through MEMS technologies. A displacement of the tip of the cantilever driven at 6 V is measured to be 7.6 μm and the transverse piezoelectric constant calculated from the displacement is –103 pm/V. 1D optical scanners have been designed, simulated, fabricated and tested. The rotation angles of the mirror of the scanners were 60-70% of the simulated values.

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Periodical:

Key Engineering Materials (Volume 301)

Pages:

37-40

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.301.37

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Online since:

January 2006

Authors:

Takeshi Kobayashi, Jiunnjye Tsaur, Masaaki Ichiki, Ryutaro Maeda

Keywords:

Cantilever, Film, Micro-Electromechanical System (MEMS), Optical MEMS, PZT, Scanner

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