Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS

Abstract:

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Flat PZT cantilevers have been successfully fabricated from the Pt/Ti/PZT/Pt/Ti/SiO2/SOI multi-layered structure through MEMS technologies. A displacement of the tip of the cantilever driven at 6 V is measured to be 7.6 μm and the transverse piezoelectric constant calculated from the displacement is –103 pm/V. 1D optical scanners have been designed, simulated, fabricated and tested. The rotation angles of the mirror of the scanners were 60-70% of the simulated values.

Info:

Periodical:

Edited by:

Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki

Pages:

37-40

DOI:

10.4028/www.scientific.net/KEM.301.37

Citation:

T. Kobayashi et al., "Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS", Key Engineering Materials, Vol. 301, pp. 37-40, 2006

Online since:

January 2006

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Price:

$35.00

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