Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS
Flat PZT cantilevers have been successfully fabricated from the Pt/Ti/PZT/Pt/Ti/SiO2/SOI multi-layered structure through MEMS technologies. A displacement of the tip of the cantilever driven at 6 V is measured to be 7.6 μm and the transverse piezoelectric constant calculated from the displacement is –103 pm/V. 1D optical scanners have been designed, simulated, fabricated and tested. The rotation angles of the mirror of the scanners were 60-70% of the simulated values.
Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
T. Kobayashi et al., "Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS", Key Engineering Materials, Vol. 301, pp. 37-40, 2006