Elastic and Plastic Mechanical Properties Determined by Nanoindentation and Numerical Simulation at Mesoscale

Feng Yuan Chen; Rwei Ching Chang

doi:10.4028/www.scientific.net/KEM.326-328.203

Paper Titles

A Study on the Birefringence Measurement in Injection Molded Parts Using Two Different Laser Sources and R-G-B Separation of White Light
p.187

Optical Retardation Measurement Using a Zeeman Laser
p.191

In Situ Fast Temperature Measurement of Silicon Thin Films during the Excimer Laser Annealing
p.195

Direct CTE Measurement Technique for the MEMS Materials
p.199

Elastic and Plastic Mechanical Properties Determined by Nanoindentation and Numerical Simulation at Mesoscale
p.203

A Study of Nano-Indentation Test Using Rhombus-Shaped Cantilever in Atomic Force Microscope
p.207

Static and Dynamic Deformation Measurements of Micro Beams by the Technique of Digital Image Correlation
p.211

Yield Property Characterization for Au and TiN Thin Films by Applying Nanoindentation Technique
p.215

Inverse Method to Determine Mechanical Properties of Thin Film by Nanoindentation and Finite Element Analysis
p.219

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Elastic and Plastic Mechanical Properties Determined by Nanoindentation and Numerical Simulation at Mesoscale

Abstract:

This work presents a comparison of numerical simulation and experiment of nanoindentation testing. A commercial finite element code ANSYS is adopted in the numerical simulation, in which elastic-plastic properties are considered. A PMMA specimen and a three side pyramidal Berkovich probe tip is used in the indentation tests. While the elastic-linear workhardening properties are adopted, the numerical results agree well with the experimental data for different indentation loads. It proves the numerical simulation can be used in the small scale analysis.