Inverse Method to Determine Mechanical Properties of Thin Film by Nanoindentation and Finite Element Analysis

Abstract:

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As a reliable tool to measure the Young’s modulus, nanoindention technique has been used widely recently. In this paper, nanoindetation technique was overviewed with its advantage and limitation and a new method was proposed to determine material properties of film, i.e. both Young’s modulus E and Poisson’s ratio ν from load-displacement curve of shallow-depth indentation using ‘inverse method’.

Info:

Periodical:

Key Engineering Materials (Volumes 326-328)

Edited by:

Soon-Bok Lee and Yun-Jae Kim

Pages:

219-222

DOI:

10.4028/www.scientific.net/KEM.326-328.219

Citation:

D. C. Baek and S. B. Lee, "Inverse Method to Determine Mechanical Properties of Thin Film by Nanoindentation and Finite Element Analysis", Key Engineering Materials, Vols. 326-328, pp. 219-222, 2006

Online since:

December 2006

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Price:

$35.00

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