Inverse Method to Determine Mechanical Properties of Thin Film by Nanoindentation and Finite Element Analysis

Dong Cheon Baek; Soon Bok Lee

doi:10.4028/www.scientific.net/KEM.326-328.219

Paper Titles

Elastic and Plastic Mechanical Properties Determined by Nanoindentation and Numerical Simulation at Mesoscale
p.203

A Study of Nano-Indentation Test Using Rhombus-Shaped Cantilever in Atomic Force Microscope
p.207

Static and Dynamic Deformation Measurements of Micro Beams by the Technique of Digital Image Correlation
p.211

Yield Property Characterization for Au and TiN Thin Films by Applying Nanoindentation Technique
p.215

Inverse Method to Determine Mechanical Properties of Thin Film by Nanoindentation and Finite Element Analysis
p.219

Residual Stress Measurement of Porous Silicon Thin Film by Substrate Curvature Method
p.223

Measurement of Mechanical Properties and Residual Stresses of Bridged Gold Films and Circular Gold Membranes
p.227

An Experimental Method for Micro-Scale Uniaxial Tension Test
p.233

Measuring Strains for Hematite Phase in Sinter Ore by Electron Backscattering Diffraction Method
p.237

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Inverse Method to Determine Mechanical Properties of Thin Film by Nanoindentation and Finite Element Analysis

Abstract:

As a reliable tool to measure the Young’s modulus, nanoindention technique has been used widely recently. In this paper, nanoindetation technique was overviewed with its advantage and limitation and a new method was proposed to determine material properties of film, i.e. both Young’s modulus E and Poisson’s ratio ν from load-displacement curve of shallow-depth indentation using ‘inverse method’.