Inverse Method to Determine Mechanical Properties of Thin Film by Nanoindentation and Finite Element Analysis
As a reliable tool to measure the Young’s modulus, nanoindention technique has been used widely recently. In this paper, nanoindetation technique was overviewed with its advantage and limitation and a new method was proposed to determine material properties of film, i.e. both Young’s modulus E and Poisson’s ratio ν from load-displacement curve of shallow-depth indentation using ‘inverse method’.
Soon-Bok Lee and Yun-Jae Kim
D. C. Baek, S. B. Lee, "Inverse Method to Determine Mechanical Properties of Thin Film by Nanoindentation and Finite Element Analysis", Key Engineering Materials, Vols. 326-328, pp. 219-222, 2006