Inverse Method to Determine Mechanical Properties of Thin Film by Nanoindentation and Finite Element Analysis

Abstract:

Article Preview

As a reliable tool to measure the Young’s modulus, nanoindention technique has been used widely recently. In this paper, nanoindetation technique was overviewed with its advantage and limitation and a new method was proposed to determine material properties of film, i.e. both Young’s modulus E and Poisson’s ratio ν from load-displacement curve of shallow-depth indentation using ‘inverse method’.

Info:

Periodical:

Key Engineering Materials (Volumes 326-328)

Edited by:

Soon-Bok Lee and Yun-Jae Kim

Pages:

219-222

DOI:

10.4028/www.scientific.net/KEM.326-328.219

Citation:

D. C. Baek and S. B. Lee, "Inverse Method to Determine Mechanical Properties of Thin Film by Nanoindentation and Finite Element Analysis", Key Engineering Materials, Vols. 326-328, pp. 219-222, 2006

Online since:

December 2006

Export:

Price:

$35.00

[1] I. N. Sneddon, Int. J. Eng. Sci. Vol. 3, 47 (1965).

[2] J. A. Knapp, D. M. Follstaedt, S. M. Myers, J. C. Barbour, T. A. Friedmann, J. of Applied Physics, Vol. 85, 3 (1999), pp.1460-1474.

In order to see related information, you need to Login.