The Microstructure and Mechanical Properties of Ti/TiN Multilayer Film Synthesized by Unbalanced Magnetron Sputtering Deposition on 17-4PH Stainless Steel

Abstract:

Ti/TiN multilayer films were synthesized on 17-4PH stainless steel using unbalanced magnetron sputtering. The modulation periods is ranged from 100nm to 350 nm. The microstructure of the multilayer films was analyzed by X-ray diffraction. The cross-section views of the multilayer films were studied by scanning electron microscope (SEM). The microhardness and wear resistance of the films were measured by a HXD-1000 microhardness tester and ball-on-disk wear tester. The corrosion resistance of the multilayer films was evaluated by potentiodynamic polarization scans in a 3% NaCl solution. The results showed that there was TiNx intergradation layer in the films. The microhardness and the wear resistance of the multilayer films increased with the layer number. The Ti/TiN multilayer can improve the corrosive resistance of the 17-4PH stainless steel.

• Periodical: Key Engineering Materials (Volumes 353-358)
• Pages: 1700-1703
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.353-358.1700
• Online since: September 2007
• Authors: Qi Zhang, Feng Qi, Yong Xiang Leng, Nan Huang, Zhen Bing Cai
• Keywords: Magnetron Sputtering, Multilayer, Titanium (Ti), Titanium Nitride, Wear Resistance

References

[1] M. Kiuchi, K. Fujii, T. Tanaka, M. Satou, F. Fujimoto: Nucl. Instr. and Meth B Vol. 33 (1988), P. 649.

[2] N. Savvides, B. Window: J. Appl. Phys. 64 (1988), P. 225.

[3] W. Ensinger, B. Rauschenbach: Nucl. Instr. and Meth. B. Vol. 80/81 (1993), P. 1409.

[4] H. Ljungcrantz, C. Engstrom, L. Hultman, and M. Olsson: J. Vac. Sci. Technol A Vol. 16(5) (1998), P. 3104.

[5] O. Knotek, F. Loffler, G. Kramer: Surf. Coat. Technol. Vol. 54-55 (1992), P. 241.

[6] M. Nordin, U. Wiklund, M. Larsson, P. Hedenqvist, S. Hogmark: presented at Nordtrib '96, Bergen, Norway, 16-19 June (1996).

[7] M. Berger, U. Wiklund, M. Eriksson, H. Engqvist, S. Jacobson, in: The multilayer effect in abrasion, Presented at PSE '98, Garmisch- Partenkirchen, 14-18 September (1998).

[8] X. Chu, S.A. Barnett, M.S. Wong, W.D. Sproul: Surf. Coat. Technol. Vol. 57 (1993), P. 13.

[9] C. Carrasco, L. Segers, B. Benavente: Journal of Materials Processing Technology Vol. 145 (2004), P. 371-376.

[10] Wuu-Ling Pan, Ge-Ping Yu, Jia-Hong Huang: Surf. Coat. Technol Vol. 110 (1998), P. 111-119.

[11] Ju-Wan Lim, Jung-Joong Lee, H. Ahn, K. -T. Rie: Surf. Coat. Technol Vol. 174-175 (2003), P. 720-724.

[12] H. Holleck, V. Schier: Surf. Coat. Technol. 76-77 (1995), P. 328.

[13] E. Andrade, M. Flores, S. Muhl, N.P. Barradas, G. Murillo, E.P. Zavala, M.F. Rocha: Nuclear Instruments and Methods in Physics Research B 219-220 (2004), P. 763-767.

DOI: 10.1016/j.nimb.2004.01.159

[14] R. Hubler: Surf. Coat. Technol. 116-119 (1999) 1116.

[15] L.A.S. Ries, D.S. Asambuja, I.J.R. Baumvol: Surf. Coat. Technol. 89 (1997) 114.