In Situ Thermal-Mechanical Fatigue Testing of Thin Au Lines

G.P. Zhang; Bin Zhang; Q.Y. Yu; J. Tan

doi:10.4028/www.scientific.net/KEM.353-358.2916

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 353-358In Situ Thermal-Mechanical Fatigue Testing of Thin...

In Situ Thermal-Mechanical Fatigue Testing of Thin Au Lines

Abstract:

An in-situ testing system for thermal-mechanical fatigue of thin metal lines was setup inside a dual-beam focused ion beam (FIB)/scanning electron microscope (SEM) system. Alternating currents (AC) were applied to narrow Au lines 200-nm-thick through nanomanipulator needles. Preliminary results show that severe thermal-mechanical fatigue damage can be generated by the action of the applied AC. The in-situ recording of the evolution of the damage has been carried out and the possible mechanism of the thermal-mechanical fatigue damage in the Au lines resulted from the joule heating was discussed.

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Periodical:

Key Engineering Materials (Volumes 353-358)

Pages:

2916-2919

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.353-358.2916

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Online since:

September 2007

Authors:

G.P. Zhang, Bin Zhang, Q.Y. Yu, J. Tan

Keywords:

In Situ Test, Metal Film, Thermal Mechanical Fatigue, Void

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