Preparation and Characterization of Silica Film on PBT Substrate by Sol-Gel Method Using Perhydropolysilazane

Hajime Horikawa; Takashi Ogihara; Akio Shimomura; Junko Shimomura

doi:10.4028/www.scientific.net/KEM.421-422.161

Paper Titles

Structural Characteristics and Ferroelectric Properties of Bismuth-Based Compound Thin Films Crystallized by Hot Isostatic Pressing
p.143

Growth and Electrical Properties of PbMg_0.047Nb_0.095Zr_0.416Ti_0.442O₃ Films Fabricated by Metalorganic Decomposition
p.148

Realization of Tunable Varactors Using Bi_1.5Zn_1.0Nb_1.5O₇ Thin Films
p.153

Influence of an External Magnetic Field on Injected Charges of a Cr₂O₃/Fe/CeO₂/Si MIS Capacitor
p.157

Preparation and Characterization of Silica Film on PBT Substrate by Sol-Gel Method Using Perhydropolysilazane
p.161

Effects of Pretreatments on Deposition Rate of Films in Aerosol Deposition Method
p.165

Study on Improvement of Oxidation-Resistant Capability of Metal-Silicide Thin Film and Application to Heater
p.169

Preparation of Thin Films of TiO₂-Nanoparticles Using Electrophoresis Deposition Method
p.173

Monte Carlo Investigation of Ferroelectric Properties in Thin Films
p.177

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Preparation and Characterization of Silica Film on PBT Substrate by Sol-Gel Method Using Perhydropolysilazane

Abstract:

Silica, silica/polymethylmethacrylate (PMMA) hybrid, and silica-particle blend silica films were successfully prepared on polybutylene terephtalate (PBT) substrate by dip coating using perhydropolysilazane (PHPS) as a silica source. The effect of thermal treatment on conversion from PHPS to silica was investigated in detail by scanning electron microscopy and Fourier transform infrared spectroscopy. Mechanical properties of silica and silica/PMMA hybrid thin films also were examined by the pencil scratch hardness tests.