Growth and Electrical Properties of PbMg_0.047Nb_0.095Zr_0.416Ti_0.442O₃ Films Fabricated by Metalorganic Decomposition

Abstract:

On the basis of experimental data on the piezoelectric pinpoint composition of ceramics of the ternary system Pb(Mg1/3Nb2/3)O3-PbZrO3-PbTiO3 (PMNZT), which we investigated in our previous report, epitaxial PbMg0.047Nb0.095Zr0.416Ti0.442O3 thick films with thicknesses ranging from 0.4 to 1.9 m were fabricated on Pt(100)/MgO(100) substrates by metalorganic decomposition. The film- thickness dependence on the structural and electrical properties (dielectric, piezoelectric and ferroelectric properties) was investigated. All PMNZT films exhibited a highly uniform (001) orientation, regardless of the film thickness. The cross-sectional transmission electron microscope micrographs and all the physical data suggest that high-density PMNZT thick films with a thickness  1.0 m can be expected to function as highly electrically insulating capacitors with high potential for piezo- and ferroelectric applications.

• Periodical: Key Engineering Materials (Volumes 421-422)
• Pages: 148-152
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.421-422.148
• Online since: December 2009
• Authors: Yuki Hasegawa, Masafumi Kobune, Yusuke Daiko, Atsushi Mineshige, Tetsuo Yazawa, Hironori Fujisawa, Masaru Shimizu, Mineharu Tsukada, Hideshi Yamaguchi, Koichiro Honda
• Keywords: Ferroelectricity, Metalorganic Decomposition, Perovskite Compound, Piezoelectricity, PMNZT, TEM

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[20] [40] [60] [80] 100 Electrode diameter : 50 µm Frequency : 13 kHz.

0. 5 1. 0 1. 5 2. 0 d33 ( pm/V) Film thickness (µm).

[20] [40] [60] [80] 100 Electrode diameter : 50 µm Frequency : 13 kHz Electrode diameter : 50 µm Frequency : 13 kHz.

0. 5 1. 0 1. 5 2. 0.

0. 5 1. 0 1. 5 2. 0 Fig. 9. Relationship between piezoelectric coefficient (d33) and film thickness of PMNZT films with various thicknesses.

[10] [20] [30] [40] [50] [0] [20] [40] [60] [80] 100 120 0. 5 1. 0 1. 5 2. 0 Remanent polarization (µC/cm2) Coercive field ( kV/cm) Film thickness (µm).

[0] [10] [20] [30] [40] [50] [0] [20] [40] [60] [80] 100 120 0. 5 1. 0 1. 5 2. 0.

[10] [20] [30] [40] [50] [0] [20] [40] [60] [80] 100 120 0. 5 1. 0 1. 5 2. 0 Remanent polarization (µC/cm2) Coercive field ( kV/cm) Film thickness (µm).

Fig. 8. The film-thickness dependence on Pr and Ec of PMNZT films.