Growth and Electrical Properties of PbMg0.047Nb0.095Zr0.416Ti0.442O3 Films Fabricated by Metalorganic Decomposition
On the basis of experimental data on the piezoelectric pinpoint composition of ceramics of the ternary system Pb(Mg1/3Nb2/3)O3-PbZrO3-PbTiO3 (PMNZT), which we investigated in our previous report, epitaxial PbMg0.047Nb0.095Zr0.416Ti0.442O3 thick films with thicknesses ranging from 0.4 to 1.9 m were fabricated on Pt(100)/MgO(100) substrates by metalorganic decomposition. The film- thickness dependence on the structural and electrical properties (dielectric, piezoelectric and ferroelectric properties) was investigated. All PMNZT films exhibited a highly uniform (001) orientation, regardless of the film thickness. The cross-sectional transmission electron microscope micrographs and all the physical data suggest that high-density PMNZT thick films with a thickness 1.0 m can be expected to function as highly electrically insulating capacitors with high potential for piezo- and ferroelectric applications.
Tadashi Takenaka, Hajime Haneda, Kazumi Kato, Masasuke Takata and Kazuo Shinozaki
Y. Hasegawa et al., "Growth and Electrical Properties of PbMg0.047Nb0.095Zr0.416Ti0.442O3 Films Fabricated by Metalorganic Decomposition", Key Engineering Materials, Vols. 421-422, pp. 148-152, 2010