ZnO Films Growth at Different Temperature on the Substrate of Corning Glass by MOCVD
We deposited ZnO films on Corning glass substrate by metal-organic chemical vapor deposition (MOCVD). We found the diffraction (002) peak at ~34.46°, indicating that the ZnO thin films were C-oriented. ZnO films were highly transparent with a transmission ratio larger than 85% in the visible range. The surface morphology of the films was observed by atomic force microscopy (AFM).
Yuan Ming Huang
W. Tang et al., "ZnO Films Growth at Different Temperature on the Substrate of Corning Glass by MOCVD", Key Engineering Materials, Vols. 428-429, pp. 447-449, 2010