Fabrication of Ultraprecision Millimeter-Thick Elliptical Neutron Focusing Mirror Substrate by Local Wet Etching

Abstract:

Numerically controlled local wet etching (NC-LWE) is a novel technique to fabricate the ultraprecision optical components and/or finishing the functional materials. In this technique, a figuring is performed by controlling the dwelling time of the combination nozzle, which consists of a supply and a suction part of an etchant, on the workpiece. In this paper, we proposed fabrication process of millimeter-thick elliptical neutron focusing mirror substrate by applying NC-LWE figuring involving CeO2 slurry polishing. We fabricated a millimeter-thick elliptical neutron focusing mirror substrate with a figure error of less than 0.2 μm and obtained a surface roughness of less than 0.15 nm rms.

• Periodical: Key Engineering Materials (Volumes 447-448)
• Pages: 208-212
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.447-448.208
• Online since: September 2010
• Authors: Fumiya Yamaga, Mikinori Nagano, Nobuyuki Zettsu, Dai Yamazaki, Ryuji Maruyama, Kazuhiko Soyama, Kazuya Yamamura
• Keywords: Elliptical Mirror, Focusing, Ion Beam Sputtering, Local Wet Etching, Neutron Supermirror

References

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