Fabrication of Ultraprecision Millimeter-Thick Elliptical Neutron Focusing Mirror Substrate by Local Wet Etching
Numerically controlled local wet etching (NC-LWE) is a novel technique to fabricate the ultraprecision optical components and/or finishing the functional materials. In this technique, a figuring is performed by controlling the dwelling time of the combination nozzle, which consists of a supply and a suction part of an etchant, on the workpiece. In this paper, we proposed fabrication process of millimeter-thick elliptical neutron focusing mirror substrate by applying NC-LWE figuring involving CeO2 slurry polishing. We fabricated a millimeter-thick elliptical neutron focusing mirror substrate with a figure error of less than 0.2 μm and obtained a surface roughness of less than 0.15 nm rms.
Jianhong Zhao, Masanori Kunieda, Guilin Yang and Xue-Ming Yuan
F. Yamaga et al., "Fabrication of Ultraprecision Millimeter-Thick Elliptical Neutron Focusing Mirror Substrate by Local Wet Etching", Key Engineering Materials, Vols. 447-448, pp. 208-212, 2010