Sub Micron Poly-Dimethyl Siloxane (PDMS) Replication Using Proton Beam Fabricated Nickel Moulds

Pei Ge Shao; Jeroen A. van Kan; Frank Watt

doi:10.4028/www.scientific.net/KEM.447-448.452

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Automatic Egg-Cell Gathering by Two Versatile Miniature Robots and a Miniature Pump on an Inverted Microscopy
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Sub Micron Poly-Dimethyl Siloxane (PDMS) Replication Using Proton Beam Fabricated Nickel Moulds
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 447-448Sub Micron Poly-Dimethyl Siloxane (PDMS)...

Sub Micron Poly-Dimethyl Siloxane (PDMS) Replication Using Proton Beam Fabricated Nickel Moulds

Abstract:

We present a process to fabricate Ni moulds on proton beam written (PBW) PMMA structures. These Ni mould are use to replicate PDMS lab on a chip devices featuring 300 nm details of high verticality, smooth sidewalls and high aspect ratios. The lifespan of the Ni mould can be extended and the functionality improved by means of introducing a 5 nm thick Teflon AF release layer. Following this method, PDMS chips have been fabricated for microfluidic experiments.

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Periodical:

Key Engineering Materials (Volumes 447-448)

Pages:

452-455

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.447-448.452

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Online since:

September 2010

Authors:

Pei Ge Shao, Jeroen A. van Kan, Frank Watt

Keywords:

Micro-Fluidics, Ni Mould, PDMS, Proton Beam Writing

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