An Easy-to-Manufacture 2 Degree-of-Freedom Remote Center of Compliance for Micro-Transfer Printing

Numair Ahmed; Reza Saeidpourazar; Placid M. Ferreira

doi:10.4028/www.scientific.net/KEM.447-448.471

Paper Titles

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Micro Machining of Metal Injection Mould with Micro Channel Features of Tens Micro Meters for Polymer Microfluidic Devices Manufacturing
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Joint Formation Mechanism and Strength in Resistance Microwelding of Brass Sheet to Fine Insulated Cu Wire
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Electrostatic Control and the Need of Feedback Control Ionization in Critical Environment of MEMS Manufacturing Process
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An Easy-to-Manufacture 2 Degree-of-Freedom Remote Center of Compliance for Micro-Transfer Printing
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Screw-Driven Multi-Channel Peristaltic Pump for Pneumatic Micro Actuator System
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Hot-Embossing of Microstructures on Large Area of Polymers
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Micro-Object Orientation Control by Using Different Vibration Modes of Board Stage
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Precision Motion Control with Active Eddy Current Damper
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An Easy-to-Manufacture 2 Degree-of-Freedom Remote Center of Compliance for Micro-Transfer Printing

Abstract:

This paper presents the design and development of a remote center of compliance (RCC) for a stamp holder for the micro-transfer printing process. One important aspect of the design of an automated printer to implementing the micro-transfer printing process is the generation of conformal contact between the stamp and the donor and acceptor substrates. Orientation errors during set up make this very hard to achieve with the introduction of some compliance. To introduce such compliance without the loss of overlay registration accuracy, a 2 degree of freedom (2-dof) remote centre of compliance is designed into the stamp holder so that its instantaneous rotation center at the face of the stamp. This design is implemented using flexure hinges in a configuration that makes the resulting system compact, in-expensive and easy to manufacture.