An Easy-to-Manufacture 2 Degree-of-Freedom Remote Center of Compliance for Micro-Transfer Printing
This paper presents the design and development of a remote center of compliance (RCC) for a stamp holder for the micro-transfer printing process. One important aspect of the design of an automated printer to implementing the micro-transfer printing process is the generation of conformal contact between the stamp and the donor and acceptor substrates. Orientation errors during set up make this very hard to achieve with the introduction of some compliance. To introduce such compliance without the loss of overlay registration accuracy, a 2 degree of freedom (2-dof) remote centre of compliance is designed into the stamp holder so that its instantaneous rotation center at the face of the stamp. This design is implemented using flexure hinges in a configuration that makes the resulting system compact, in-expensive and easy to manufacture.
Jianhong Zhao, Masanori Kunieda, Guilin Yang and Xue-Ming Yuan
N. Ahmed et al., "An Easy-to-Manufacture 2 Degree-of-Freedom Remote Center of Compliance for Micro-Transfer Printing", Key Engineering Materials, Vols. 447-448, pp. 471-477, 2010