Electrostatic Control and the Need of Feedback Control Ionization in Critical Environment of MEMS Manufacturing Process

Anusorn Chakkaew; Wisut Titiroongruang

doi:10.4028/www.scientific.net/KEM.447-448.466

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 447-448Electrostatic Control and the Need of Feedback...

Electrostatic Control and the Need of Feedback Control Ionization in Critical Environment of MEMS Manufacturing Process

Abstract:

This paper describes new electrostatic control countermeasures and solutions for critical electrostatic control environment for MEMS manufacturing processes, especially in MEMS’s wafer handling that needs low electrostatic voltage. This includes personnel grounding methodology, ESD event measurement, and low ion imbalance ionization to support current and future needs of the MEMS.

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Periodical:

Key Engineering Materials (Volumes 447-448)

Pages:

466-470

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.447-448.466

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Online since:

September 2010

Authors:

Anusorn Chakkaew, Wisut Titiroongruang

Keywords:

Electrostatic Discharge (ESD), ESD Event, HBM, Micro-Electromechanical System (MEMS), Personal Grounding

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References

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