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Guide Pattern for Long-Range-Order Nanofabrication of Self-Assembled Block Copolymers

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Abstract:

In this paper, we report two kinds of guide patterns precisely created by electron beam drawing. These guide patterns are expected to precisely control the arrangement of nanodots self-assembled from block copolymer (BCP) in order to obtain long-range-order nanofabrication. The first guide pattern is comprised only of a post lattice. The second guide pattern adds guide lines to the post lattice. The added guide lines are expected to better control the location and orientation of the BCP nanodots. We succeeded in fabricating these two kinds of guide patterns for 22-nm- and 33-nm-pitch BCP nanodots.

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Periodical:

Key Engineering Materials (Volume 459)

Pages:

124-128

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.459.124

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Online since:

December 2010

Authors:

Takashi Akahane, Miftakhul Huda, You Yin, Sumio Hosaka

Keywords:

Block-Copolymer, Electron Beam Drawing, Guide Pattern, Nanodot, Self-Assembly

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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