Prototype of Illumination-Collection Mode Scanning Near-Field Optical Microscopy and Raman Spectroscopy with Gold Inner-Coated Aperture-Less Pyramidal Probe

Abstract:

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We have prototyped illumination-collection mode scanning near-field optical microscopy (SNOM) and near-field Raman spectroscopy (NFRS) with gold inner-covered aperture-less pyramidal probe in order to study the possibility to detect optical images, and Raman spectrum and Raman peak shift for stress distribution in Si device with high resolution of about 10 nm.

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Periodical:

Edited by:

Osamu Hanaizumi and Masafumi Unno

Pages:

129-133

DOI:

10.4028/www.scientific.net/KEM.459.129

Citation:

S. Hosaka et al., "Prototype of Illumination-Collection Mode Scanning Near-Field Optical Microscopy and Raman Spectroscopy with Gold Inner-Coated Aperture-Less Pyramidal Probe", Key Engineering Materials, Vol. 459, pp. 129-133, 2011

Online since:

December 2010

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$35.00

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