Demonstration of Light-Emitting Two-Dimensional Photonic Crystals Composed of Silicon-Rich Silicon-Dioxide Thin Films

Kenta Miura; Osamu Hanaizumi

doi:10.4028/www.scientific.net/KEM.459.173

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Theoretical Analysis of Photonic Band Gaps and Defect Modes of Novel Photonic Crystal Waveguides Consisting of Si-Ion Implanted SiO₂ Using the Finite-Difference Time-Domain Method
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Design and Fabrication of Novel Photonic Crystal Waveguide Consisting of Si-Ion Implanted SiO₂ Layers
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Demonstration of Light-Emitting Two-Dimensional Photonic Crystals Composed of Silicon-Rich Silicon-Dioxide Thin Films
p.173

Tilt Mechanism for Precision Control of Down-Slope Component of Gravitational Force for Micro Force Generation
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Microforce Material Tester Using Small Pendulum
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Interdigital Ring Coupler Sensor for Parameter Estimation of Moving Objects
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A Design Method for Two-Degree-of-Freedom Multi-Period Repetitive Control Systems
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 459Demonstration of Light-Emitting Two-Dimensional...

Demonstration of Light-Emitting Two-Dimensional Photonic Crystals Composed of Silicon-Rich Silicon-Dioxide Thin Films

Abstract:

A light-emitting, two-dimensional photonic crystal composed of silicon-rich silicon-dioxide thin film was fabricated by using radio-frequency magnetron sputtering, simple interference exposure, and plasma etching. An enhanced photoluminescence spectrum was observed from the photonic crystal. We found that the photoluminescence peak was located around a wavelength of 830 nm and that the peak intensity was 1.5 times stronger than that from a silicon-rich silicon-dioxide thin film without a periodic structure.

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Periodical:

Key Engineering Materials (Volume 459)

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173-176

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.459.173

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Online since:

December 2010

Authors:

Kenta Miura, Osamu Hanaizumi

Keywords:

Photoluminescence (PL), Photonic Crystal (PC), Silicon, Silicon Dioxide

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References

[1] K. Sato, M. Iwase, T. Izumi, Y. Show, and H. Morisaki: T. IEE Japan Vol. 122-A (2002), p.616 [in Japanese].

Google Scholar

[2] Y. Yamada, T. Orii, I. Umezu, S. Takeyama, and T. Yoshida: Jpn. J. Appl. Phys. Vol. 35 (1996), p.1361.

Google Scholar

[3] L. Pavesi, L. D. Negro, C. Mazzoleni, G. Franzo, and F. Priolo: Nature Vol. 408 (2000), p.440.

Google Scholar

[4] O. Hanaizumi, K. Ono, and Y. Ogawa: Appl. Phys. Lett. Vol. 82 (2003), p.538.

Google Scholar

[5] O. Hanaizumi, K. Ono, Y. Ogawa, T. Koga, Y. Hasegawa, A. Ogihara, and G. Saito: Jpn. J. Appl. Phys. Vol. 41 (2002), p. L1084.

DOI: 10.1143/jjap.41.l1084

Google Scholar

[6] K. Miura, T. Matsumoto, O. Takei, Y. Kato, T. Tanemura, H. Hoshino, and O. Hanaizumi, IEICE Technical Report, OPE2006-119 (2006) [in Japanese].

Google Scholar

[7] K. Orita, S. Tamura, T. Takizawa, T. Ueda, M. Yuri, S. Takigawa, and D. Ueda: Jpn. J. Appl. Phys. Vol. 43 (2004), p.5809.

DOI: 10.1143/jjap.43.5809

Google Scholar

[8] T. Sato, K. Miura, N. Ishino, Y. Ohtera, T. Tamamura, and S. Kawakami: Opt. Quantum Electron. Vol. 34 (2002), p.63.

DOI: 10.1023/a:1013382711983

Google Scholar