Demonstration of Light-Emitting Two-Dimensional Photonic Crystals Composed of Silicon-Rich Silicon-Dioxide Thin Films

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A light-emitting, two-dimensional photonic crystal composed of silicon-rich silicon-dioxide thin film was fabricated by using radio-frequency magnetron sputtering, simple interference exposure, and plasma etching. An enhanced photoluminescence spectrum was observed from the photonic crystal. We found that the photoluminescence peak was located around a wavelength of 830 nm and that the peak intensity was 1.5 times stronger than that from a silicon-rich silicon-dioxide thin film without a periodic structure.

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Periodical:

Edited by:

Osamu Hanaizumi and Masafumi Unno

Pages:

173-176

DOI:

10.4028/www.scientific.net/KEM.459.173

Citation:

K. Miura and O. Hanaizumi, "Demonstration of Light-Emitting Two-Dimensional Photonic Crystals Composed of Silicon-Rich Silicon-Dioxide Thin Films", Key Engineering Materials, Vol. 459, pp. 173-176, 2011

Online since:

December 2010

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$35.00

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