Nanometer-Scale Characterization Technique for Si Nanoelectric Materials Using Synchrotron Radiation Microdiffraction
We have developed new microdiffraction system at the SPring-8. This system uses a focused beam produced using a phase zone plate combined with a narrow slit, which makes a small focused beam that has a small angular divergence. Furthermore, we can use the two-dimensional x-ray CCD detector, which enable us to measure local reciprocal space maps at many points in a sample, that is, the distribution of strain fields and lattice tilts can be revealed in high-angular- and high-spatial-resolution.
Seiichi Miyazaki and Hitoshi Tabata
S. Kimura et al., "Nanometer-Scale Characterization Technique for Si Nanoelectric Materials Using Synchrotron Radiation Microdiffraction", Key Engineering Materials, Vol. 470, pp. 104-109, 2011