Dynamic Characteristics Measurement of Silicon Micro-Cantilever in Low Temperature Environment

Abstract:

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The dynamic testing system for MEMS in low temperature environment has been developed. A thermoelectric cooling refrigerator was utilized to generate the low temperature environment. The base excitation device was established using the piezoelectric ceramic as the driving source. A vacuum chamber was designed to protect the micro-structure from the humid air. Through the base impact excitation, the resonance frequencies are obtained by analyzing the impulse response signals. The frequency response of micro-cantilever was obtained by using both BIST method and laser Doppler vibrometer. The dynamic testing experiments for the silicon micro-cantilever were carried out from -50°C to room temperature. The result shows that the resonance frequency slightly increases with the decreasing temperature. The measurement device is effective to carry out dynamic testing of microstructure from -50°C to room temperature.

Info:

Periodical:

Edited by:

Xiaohao Wang

Pages:

18-22

DOI:

10.4028/www.scientific.net/KEM.483.18

Citation:

D. S. She et al., "Dynamic Characteristics Measurement of Silicon Micro-Cantilever in Low Temperature Environment", Key Engineering Materials, Vol. 483, pp. 18-22, 2011

Online since:

June 2011

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Price:

$35.00

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