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Study of Under Etching Characters of Si (100) in Surfactant Added TMAH
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Design and System-Level Simulation of a Novel On-Chip Test Based on Macromodels
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An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope
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An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope

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Abstract:

This paper proposed an effective approach for extending the bandwidth of MEMS vibratory gyroscope by employing the electrostatic force feedback control. The mathematical model for the bandwidth is established through the dynamic model of the gyroscope, which indicates that the bandwidth of the sensor depends on the difference between the resonant frequencies of the two working modes. The system bandwidth can be enlarged by utilizing electrostatic force rebalance control to null Coriolis force caused by external angular rate which can also improve the performance of the transient response. Simulation results forecast a satisfactory performance of the control system with suggested control method.

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Periodical:

Key Engineering Materials (Volume 483)

Pages:

43-47

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.483.43

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Online since:

June 2011

Authors:

Jian Cui, Zhong Yang Guo, Qian Cheng Zhao, Zhen Chuan Yang, Yi Long Hao, Gui Zhen Yan

Keywords:

Bandwidth (BW), Electrostatic Force Feedback, MEMS Vibratory Gyroscope, Rebalance Control

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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