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An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope
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Fabrication of Large Area, 70 nm Pitch Nanograting Patterns by Nanoimprint Lithography Using Flexible Polymer Stamp
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Fabrication and Testing of SOG Structure Flat Heat Pipes with Triangle Grooves
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Fabrication of Large Area, 70 nm Pitch Nanograting Patterns by Nanoimprint Lithography Using Flexible Polymer Stamp

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Abstract:

Flexible polymer stamps are considered as an attractive alternative to rigid, brittle and expensive stamps made of inorganic materials because of their low cost and ease of fabrication. In this paper, we present a nanoimprint process to fabricate large area, high-resolution nanograting patterns using flexible polymer stamp made from fluoropolymer. The flexibility and low surface energy of polymer stamp provide a clean release without fracture or deformation of the stamp and of the replicated nanograting. Large-area, high-density nanograting patterns with good shape homogeneity and size uniformity have been successfully fabricated using the flexible polymer stamp with advantages of its good conformal contact and low adhesion. Using flexible polymer stamps can resolve many serious issues in NIL and therefore can bring it to real industrial applications.

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Periodical:

Key Engineering Materials (Volume 483)

Pages:

48-52

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.483.48

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Online since:

June 2011

Authors:

Fan Tao Meng, Jin Kui Chu, Gang Luo, Zhi Tao Han, Zhi Wen Wang

Keywords:

Flexible Polymer Stamp, High-Resolution, Large Area, Nanograting, Nanoimprint Lithography

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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