Paper Titles
Study of Under Etching Characters of Si (100) in Surfactant Added TMAH
p.34
Design and System-Level Simulation of a Novel On-Chip Test Based on Macromodels
p.38
An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope
p.43
Fabrication of Large Area, 70 nm Pitch Nanograting Patterns by Nanoimprint Lithography Using Flexible Polymer Stamp
p.48
Effect of Micro-Injection Molding Process Parameters for Various Micro-Channels
p.53
Fabrication and Testing of SOG Structure Flat Heat Pipes with Triangle Grooves
p.58
Application of KOH Anisotropic Etching in the Fabrication of MEMS Devices
p.62
Fabrication of Nano-Grating by Focused Ion Beam / Scanning Electron Microscopy Dual-Beam System
p.66
A Monolithic MEMS Accelerometer Process
p.70

Effect of Micro-Injection Molding Process Parameters for Various Micro-Channels

Article Preview

Abstract:

Micro-channels were the main microstructures in most micro-fluidic devices. In this paper, the effects of injection molding process parameters on the replicability of micro-channels profile are studied. Orthogonal experiments (Taguchi method) are carried out to establish the relationship between injection process parameters and replication accuracy for various micro-channels. Experimental results show that mold temperature and packing pressure are the principal factors in molding process. The replication accuracy depends strongly on the processing conditions. The replication accuracy reached about 99.84% using the optimum parameters.

You might also be interested in these eBooks
MEMS/NEMS Nano Technology View Preview

Info:

Periodical:

Key Engineering Materials (Volume 483)

Pages:

53-57

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.483.53

Citation:

Cite this paper

Online since:

June 2011

Authors:

Duo Yang, Chong Liu, Zheng Xu, Ji Zhang Wang, Li Ding Wang

Keywords:

Micro-Channel, Micro-Injection Molding, Orthogonal Experiment

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2011 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] B.K. Lee, D.S. Kim, T.H. Kwon. Replication of microlens arrays by injection molding. Microsystem Technologies. (2004) 10: 531–535.

DOI: 10.1007/s00542-004-0387-2

Google Scholar

[2] ZHANG Kaifeng, LU Zhen. Analysis of morphology and performance of PP microstructures manufactured by micro injection molding J. Microsyst Technol. (2008)14(2): 209-214.

DOI: 10.1007/s00542-007-0412-3

Google Scholar

[3] DESPA M S, KELLY K W, COLLIER J R. Injection molding of polymeric LIGA HARMS J. Microsyst. Technol, (1999) 6: 60-66.

DOI: 10.1007/s005420050176

Google Scholar

[4] SHA B, DIMOV S, GRIFFITHS C, et al. Investigation of micro-injection moulding：Factors affecting the replication quality J. Mater. Process. Techno, (2007) 183: 284-296.

DOI: 10.1016/j.jmatprotec.2006.10.019

Google Scholar

[5] ZHAO J, MAYES R H, CHEN G, et al. Effects of process parameters on the micro molding process J. Polym. Eng. Sci, (2003) 43: 1542-1554.

DOI: 10.1002/pen.10130

Google Scholar

[6] Z. Xu, Y.Q. Li, C. L et al. Numerical study of the protuberance effects on capillary electrophoresis separation in the micro-channel. Chinese Journal of Computational Mechanics. (2007) 1(24): 25-29.

Google Scholar

[7] Z.X. Liu, Y.H. Huang, A.M. Tian. Design and Analysis of Experiments. Beijing, Chemical Industry Press(2005), (in Chinese).

Google Scholar