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Fabrication of Nano-Grating by Focused Ion Beam / Scanning Electron Microscopy Dual-Beam System

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Abstract:

The uniform, well designed nano-gratings have been successfully fabricated by using a dual beam focused ion beam (FIB)/scanning electron microscopy (SEM) system on the silicon substrates coated with 15 nm thick Au layer. The nano-gratings were designed with period of 840 nm, groove of 425 nm and beam of 415 nm. By adjusting the FIB parameters of milling like beam current, dwell time and scanning model, the fabricated nano-gratings were uniform in width and the side wall had good verticality. The currently fabricated nano-gratings using focused ion beam can be adjusted to serve as sub-wavelength optical resonant sensor which can be extended to nano-grating accelerometer with resolution of 10-9g.

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Periodical:

Key Engineering Materials (Volume 483)

Pages:

66-69

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.483.66

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Online since:

June 2011

Authors:

Bao Yin Yao, Hu Luo, Li Shuang Feng, Zhen Zhou, Rong Ming Wang, Yuan Yuan Chi

Keywords:

FIB/SEM Dual Beam System, Grating Transducer, Nano-Grating, Optical MEMS Accelerometer

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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