Design and System-Level Simulation of a Novel On-Chip Test Based on Macromodels
p.38
p.38
An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope
p.43
p.43
Fabrication of Large Area, 70 nm Pitch Nanograting Patterns by Nanoimprint Lithography Using Flexible Polymer Stamp
p.48
p.48
Effect of Micro-Injection Molding Process Parameters for Various Micro-Channels
p.53
p.53
Fabrication and Testing of SOG Structure Flat Heat Pipes with Triangle Grooves
p.58
p.58
Application of KOH Anisotropic Etching in the Fabrication of MEMS Devices
p.62
p.62
Fabrication of Nano-Grating by Focused Ion Beam / Scanning Electron Microscopy Dual-Beam System
p.66
p.66
A Monolithic MEMS Accelerometer Process
p.70
p.70
Fabrication and Performance Simulation of Microscale Thermoelectric Modules Made with Bi2Te3-Based Alloys
p.75
p.75
Fabrication and Testing of SOG Structure Flat Heat Pipes with Triangle Grooves
Abstract:
A new kind of charging and sealing method for SOG (silicon on glass) structure micro heat pipe with triangular grooves is investigated. MHP (micro heat pipe) is fully charged in a vacuum atmosphere which is useful for preventing air intermingle. Experimental results shows that when the fill ration of working fluid is about 35%, thermal conductivity of MHP with ethanol as its working fluid has an improvement of 19% compared to empty MHP.
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Periodical:
Key Engineering Materials (Volume 483)
Pages:
58-61
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Online since:
June 2011
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© 2011 Trans Tech Publications Ltd. All Rights Reserved
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