Optimization Based on ANSYS Electric Numerical Method for a Novel MEMS ESI-MS Ion Focusing Device

Cui Hong Yue; He Lin Zou

doi:10.4028/www.scientific.net/KEM.483.727

Paper Titles

Performance Analysis of a Novel MEMS Terminational Latch Mechanism
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Stability Analysis in High-Order Electromechanical Sigma-Delta Accelerometer
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Experimental Research on Lift up and Drag Reduction Effect of Streamwise Travelling Wave Wall
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Optimization Based on ANSYS Electric Numerical Method for a Novel MEMS ESI-MS Ion Focusing Device
p.727

Tribological Properties of Magnesium Silicate Powders Prepared by Ball Milling
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TCR of the Ni-Cr Thin Film Resistors Used in Piezoresistive Pressure Sensor
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Threshold Values Analysis of Substrate Parameters Based on MEMS Microstrip Filter
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 483Optimization Based on ANSYS Electric Numerical...

Optimization Based on ANSYS Electric Numerical Method for a Novel MEMS ESI-MS Ion Focusing Device

Abstract:

In order to improve the ion transmission efficiency from atmospheric pressure MEMS electrospray (ESI) ion source to mass spectrometry (MS), a novel ion focusing device has been developed and simulated by FEM method (ANSYS). The ion focusing device consists of two electrodes with progressively smaller internal diameters to which electric potential are applied. Taguchi DOE has been used in the optimization process of the structures and critical dimensions for the device. Postprocessing has been implemented by Kriging interpolation method. The shapes of equipotential lines are measured to obtain the response for Taguchi DOE by CAD software. The significance of each factor and optimized structure has been obtained by signal-to-noise (S/N) ratio and means variance analysis. The simulation results will provide good reference for experiments.

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Periodical:

Key Engineering Materials (Volume 483)

Pages:

727-730

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.483.727

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Online since:

June 2011

Authors:

Cui Hong Yue, He Lin Zou

Keywords:

ANSYS, Electrostatic, Equipotential Line, ESI/MS, Finite Element Model (FEM), Micro-Electromechanical System (MEMS), Taguchi DOE

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