Planarization of Zinc Oxide Surface and Evaluation of Processing Damage
The processes for polishing a ZnO surface were investigated with the aim of establishing a process for obtaining an atomically flat surface with high crystalline quality. The defects in a layer undergoing mechanical polishing were monitored through photoluminescence measurements, and the purity of the polished surface was characterized by SIMS. An atomicallyfishing process.
Chazono Hirokazu, Fujihara Shinobu, Katayama Keiichi, Masumoto Hiroshi, Mizoguchi Teruyasu, Osada Minoru, Shinozaki Kazuo and Takeda Hiroaki
H. Miyazaki et al., "Planarization of Zinc Oxide Surface and Evaluation of Processing Damage", Key Engineering Materials, Vol. 485, pp. 215-218, 2011