Planarization of Zinc Oxide Surface and Evaluation of Processing Damage

Abstract:

Article Preview

The processes for polishing a ZnO surface were investigated with the aim of establishing a process for obtaining an atomically flat surface with high crystalline quality. The defects in a layer undergoing mechanical polishing were monitored through photoluminescence measurements, and the purity of the polished surface was characterized by SIMS. An atomicallyfishing process.

Info:

Periodical:

Edited by:

Chazono Hirokazu, Fujihara Shinobu, Katayama Keiichi, Masumoto Hiroshi, Mizoguchi Teruyasu, Osada Minoru, Shinozaki Kazuo and Takeda Hiroaki

Pages:

215-218

DOI:

10.4028/www.scientific.net/KEM.485.215

Citation:

H. Miyazaki et al., "Planarization of Zinc Oxide Surface and Evaluation of Processing Damage", Key Engineering Materials, Vol. 485, pp. 215-218, 2011

Online since:

July 2011

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Price:

$35.00

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