The Use of Vacuum Deposition for Fabrication of Optical Amplifying Mediums and Fiber Optic Modules
There has shown new vacuum technique of making planar waveguides doped with rare earths, on the basis of simultaneous vacuum deposition of quartz and alloying components. This technology allows to create optical waveguiding layers and amplifying planar compositions on wafers of silicon or quartz, and allows the dose-doping quartz with rare-earth elements, as well as germanium oxide and aluminum oxide, to obtain the optimal composition of a planar waveguide. With the help of lithography formed planar guide mediums with amplifying and modulating properties. There have been researched the methods of production of laboratory models of optical amplifying mediums, using vacuum technology, for the manufacture of planar erbium-doped amplifiers.
J. D. Elchiev et al., "The Use of Vacuum Deposition for Fabrication of Optical Amplifying Mediums and Fiber Optic Modules", Key Engineering Materials, Vol. 500, pp. 90-93, 2012