Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope

Bing Mo; Qi Zheng; Si Hao Chen; Huo Zhou; Chao Dong Ling

doi:10.4028/www.scientific.net/KEM.503.179

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 503Closed-Loop Driving Circuit Based on Frequency...

Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope

Abstract:

Closed-loop driving circuit is widely used in the high performance micrimachined gyroscope. But in the capacitive micromachined gyroscope, this circuit can be self-oscillation incapability because of signal coupling by parasitical capacitance. A novel closed-loop driving circuit based on the frequency modulation method is present in this paper. Since the frequency of driving signal is modulated, it is different from the frequency of sensing current. Even if there is coupling, the phase requirement of closed-loop driving method is not destroyed, which overcomes the disadvantage of self-oscillation incapability. Both the simulations and test results are provided, which demonstrates the feasibility of this method.

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Periodical:

Key Engineering Materials (Volume 503)

Pages:

179-182

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.503.179

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Online since:

February 2012

Authors:

Bing Mo, Qi Zheng, Si Hao Chen, Huo Zhou, Chao Dong Ling

Keywords:

Closed-Loop, Driving Circuit, Frequency Modulation, Micromachined Gyroscope

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References

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