Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes

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Abstract:

Because of the imperfections of the manufacture, the quadrature and offset error become the major concerns in Micro-gyroscopes for high performance. So in order to eliminate and minimize quadrature and offset error, various methods employing improvement of manufacture and suppression circuitry have been put forward to improve the performance. And this paper summarize most of the suppression methods those who have better performance.

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174-178

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February 2012

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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[1] Lili Dong,"A Novel Oscillation Controller for Vibrational MEMS Gyroscopes."

Google Scholar

[2] Xu Yishen,Wang Shourong,etc,"Analysis on quadrature error of micromachined vibratory gyroscope," Chinese Journal of Scientific Instrument, June,2006.

Google Scholar

[3] Cenk Acar, "Distributed-Mass Gyroscopes for Enhanced Mode Decoupling"

Google Scholar

[4] Dingbang Xiao,Xuezhong Wu,etc,"High Performance Structurally Decoupled Micromachined Gyroscope," in IEEE SENSORS 2008,Conference,1-4244-2581.

DOI: 10.1109/icsens.2008.4716464

Google Scholar

[5] X.Z. Chi, X.S. Liu, "Modeling and Identification of the Doubly Decoupled X-axis Micromachined Gyroscope." Nano/Micro Engineered and Molecular Systems, 2008, Sanya

DOI: 10.1109/nems.2008.4484498

Google Scholar

[6] P. Merz1, W. Pilz1, "IMPACT OF Si DRIE ON GYROSCOPE PERFORMANCE."

Google Scholar

[7] Byoung-doo Choi, etc,"The First Sub-Deg/HR Bias Stability, Silicon Micro-fabricated Gyroscope," in the 13th International Conference on Solid-state Sensors, June 5-9,2005.

DOI: 10.1109/sensor.2005.1496388

Google Scholar

[8] Qin Shi, Wang Shourong, "Design Principle of Suspension of MEMS Gyroscope," 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2006.

DOI: 10.1109/nems.2006.334695

Google Scholar

[9] Zhou Zhiguang,Chang Honglong, "Error Suppression Circuit for Micro machined Gyroscope." Chinese Journal Of Sensor And Actuators,June,2010(in chinese)

Google Scholar

[10] Bo Yang,"A Quadrature and Offset Error Suppression Circuitry for Silicon Gyroscope" 3rd IEEE Int. Conf. On Nano/Micro Engineered and Molecular Systems,January 6-9, 2008.

DOI: 10.1109/nems.2008.4484364

Google Scholar

[11] Yon Yin,"Structure-Decoupled Dual-Mass MEMS Gyroscope with Self-Adaptive Closed-Loop Detection," in Proceedings of the 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems January 20-23.

DOI: 10.1109/nems.2010.5592480

Google Scholar

[12] Riccardo Antonello, Roberto Oboe, "Open loop Compensation of the quadrature Error in MEMS Vibrating Gyroscopes."

DOI: 10.1109/iecon.2009.5415319

Google Scholar