Design and Simulation of a Capacitive Biaxial Microaccelerometer

Yu Liu; Zhi Yu Wen; Li Chen; Hong Yun Yang

doi:10.4028/www.scientific.net/KEM.503.194

Paper Titles

Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes
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Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope
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Design and Simulation of Multi-Microchannel for Thermal Wind Sensor
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Study of High Sensitivity Sensor Based on the Principle of Photoionization
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Design and Simulation of a Capacitive Biaxial Microaccelerometer
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Air Gap Flux Density for the Planar Motor
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A High-Performance Mash Fourth-Order Sigma-Delta Modulator
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Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation
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A Novel Preconcentration Method for Microchip Based Electrophoresis and its Numerical Simulation
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 503Design and Simulation of a Capacitive Biaxial...

Design and Simulation of a Capacitive Biaxial Microaccelerometer

Abstract:

This paper presents a capacitive biaxial microaccelerometer with a single proof mass. The theoretical analysis results are conﬁrmed by ﬁnite element analysis. The experimental results indicate the biaxial accelerometer with uniform axial sensitivities, good linearity and high cross-axis sensitivity immunity to the z-axis input.

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Periodical:

Key Engineering Materials (Volume 503)

Pages:

194-198

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.503.194

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Online since:

February 2012

Authors:

Yu Liu, Zhi Yu Wen, Li Chen, Hong Yun Yang

Keywords:

Biaxial Capacitive Sensors, Finite Element Analysis (FEA), MEMS Accelerometer, Microstructure

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