Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation

Yan Long Shang; Jun Bo Wang; De Yong Chen; Qiang Shi; Guang Bei Li

doi:10.4028/www.scientific.net/KEM.503.211

Paper Titles

Study of High Sensitivity Sensor Based on the Principle of Photoionization
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Design and Simulation of a Capacitive Biaxial Microaccelerometer
p.194

Air Gap Flux Density for the Planar Motor
p.201

A High-Performance Mash Fourth-Order Sigma-Delta Modulator
p.207

Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation
p.211

A Novel Preconcentration Method for Microchip Based Electrophoresis and its Numerical Simulation
p.216

Simulation of Injection Molding of Ultra-Thin Light Guide Plate with Hemispherical Microstructures
p.222

Design of a MEMS Broadband Microstrip Patch Antenna Based on Minkowski Fractal Boundary
p.227

Investigation on Transmittance and Uniformity of Light Diffuser Plate of Scattering Optical Transmission Polymer
p.232

HomeKey Engineering MaterialsKey Engineering Materials Vol. 503Closed-Loop Control of a SOI-MEMS Resonant...

Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation

Abstract:

A closed-loop control system designed for a SOI-MEMS resonant accelerometer is proposed in this paper. The sensor chip was developed by silicon-direct-bonding SOI wafer (10+2+290 um) with MEMS fabrication technology. Z-axis acceleration is differentially detected by using two H-style vibrating beams through a frequency shift caused by the inertial force acting as bending stress loading. The electromagnetically excitation and detection is adopted to make the closed-loop control of the sensor easier. The whole closed-loop control system designed for the accelerometer mainly consists of amplifier, automatic gain control (AGC) circuit, buffer and phase shifter. Testing results show that the accelerometer with the closed-loop system can work stable at the frequency of 58.958 kHz when 1g z-axis acceleration is applied which is consistent with the open-loop testing.

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Periodical:

Key Engineering Materials (Volume 503)

Pages:

211-215

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.503.211

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Online since:

February 2012

Authors:

Yan Long Shang, Jun Bo Wang, De Yong Chen, Qiang Shi, Guang Bei Li

Keywords:

Closed-Loop Control, Electromagnetic Excitation, Resonant Accelerometer, SOI MEMS

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