A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror

Wei Min Wang; Feng Gang Tao; Jian Fei Zhang; Jun Yao

doi:10.4028/www.scientific.net/KEM.503.169

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 503A 19 Element Hexagonal Actuator Arrangement...

A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror

Abstract:

A new hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror is proposed, a mirror array with 19 elements is fabricated by a surface micromachining process. This design has a good fitting capability and a fast dynamic response. The fabricated sample is tested by an optical profiler. Simulation and test results indicate that it has a small aperture size, a high fill factor, a fast response time and a high working bandwidth. This new device provides a possibility of manufacturing a large-actuator-count DM for high speed wavefront control.

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Periodical:

Key Engineering Materials (Volume 503)

Pages:

169-173

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.503.169

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Online since:

February 2012

Authors:

Wei Min Wang, Feng Gang Tao, Jian Fei Zhang, Jun Yao

Keywords:

Deformable Mirror, Dynamic Response, Hexagonal Arrangement, MEMS

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