Analysis and Improvement of a 3 Axis Accelerometer

Abstract:

In this paper, an integrated 3-axis MEMS accelerometer was analyzed. Because of asymmetrical structure, z-axis sensing element, which was imbedded in the proof mass of lateral accelerometers, had large mechanical coupling. Simulation result showed that the cross talk in z-axis was as high as 64.3%. To solve the problem, a fully symmetrical structure with vertical springs was adopted in z-axis sensing element. The movement of z-axis was linear vertical displacement instead of torsional displacement. Simulation results showed there was no obvious cross talk in z-axis sensing element.

• Periodical: Key Engineering Materials (Volume 503)
• Pages: 163-168
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.503.163
• Online since: February 2012
• Authors: Shi Tao Wang, Yu Bin Jia, Bin Zhen Zhang, Xue Song Liu, Qin Wen Huang, Yi Long Hao
• Keywords: 3-Axis Accelerometer, Cross Talk, Mechanical Coupling, Out-of-Plane Movement

References

[1] Hao Luo: Integrated multiple device CMOS-MEMS IMU systems and RF MEMS applications, PhD thesis, Carnegie Mellon University (2002).

[2] Hongwei Qu: Development of DRIE CMOS-MEMS process and integrated accelerometers, PhD thesis, University of Florida (2006).

[3] Haitao Ding, Jian Cui, Xuesong Liu, Xiaozhu Chi, Zhenchuan Yang, Guizhen Yan: A highly double-decoupled self-oscillation gyroscope operating at atmospheric pressure, Sensors 2008 IEEE, Oct. 2008, pages: 674 – 677 (2008).

DOI: 10.1109/icsens.2008.4716531

[4] Alper S.E., Akin T.: High-Performance SOI-MEMS Gyroscope with Decoupled Oscillation Modes, Micro Electro Mechanical Systems, MEMS 2006 Istanbul. 19th IEEE International Conference on, pages: 70 – 73 (2006).

DOI: 10.1109/memsys.2006.1627738

[5] W. Geiger, B. Folkmer, U. Sobe, H. Sandmaier, W. Lang: New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes, TRANSDUCERS '97 Chicago., 1997 International Conference on, Volume 2, 16-19 June 1997 Page(s): 1129 – 1132 (1997).

DOI: 10.1109/sensor.1997.635401

[6] A. Selvakumar and K. Najafi: A high-sensitivity Z-axis capacitive silicon microaccelerometer with a torsional suspension, Journal of Microelectro-mechanical Systems, 7(2): 192–200 (1998).

DOI: 10.1109/84.679356

[7] Xuesong Liu, Zhenchuan Yang, Xiaozhu Chi, et. al.: A doubly decoupled lateral axis micromachined gyroscope, Sensors and Actuators A, Vol. 154(2): 218-221 (2009).

DOI: 10.1016/j.sna.2008.10.015

[8] Xuesong Liu, Zhenchuan Yang, Xiaozhu Chi, Jian Cui, Haitao Ding, Zhongyang Guo, Bo Lv, Guizhen Yan: An x-axis micromachined gyroscope with doubly decoupled oscillation modes, Micro Electro Mechanical Systems, 2008, MEMS 2008, IEEE 21st International Conference on, Tucson, USA, pp.860-863 (2008).

DOI: 10.1109/nems.2008.4484497

[9] Zhenchuan Yang, Congshun Wang, Guizhen Yan, Yilong Hao, Guoying Wu, A bulk micromachined lateral axis gyroscope with vertical sensing comb capacitors, Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers, TRANSDUCERS '05, Volume 1, June 2005 pages: 121 - 124.

DOI: 10.1109/sensor.2005.1496374

[10] Kuikai Xie: Gyroscope and micromirror design using vertical-axis CMOS-MEMS actuation and sensing, PhD. 's thesis, CMU (2002).