A High Performance Fourth-Order Single-Loop Sigma Delta Modulator Applied in Micro-Inertial Sensors

Peng Fei Wang; Yuan Yuan; Dong Bo Wang; Xiao Wei Liu; Jun'an Liu

doi:10.4028/www.scientific.net/KEM.503.303

Paper Titles

Study of a MEMS Short-Circuit Fuse Based on Electro-Thermal Theory
p.277

Simulation on S Parameter of an X-Band Wilkinson Power Divider
p.287

Application of ICP Deep Trenches Etching in the Fabrication of FBAR Devices
p.293

Analysis of Broken Wires during Gold Wire Bonding Process
p.298

A High Performance Fourth-Order Single-Loop Sigma Delta Modulator Applied in Micro-Inertial Sensors
p.303

An In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency
p.308

Design and Simulation for Tri-Axial Piezoresistive MEMS Accelerometer
p.312

Emulated Analysis of the Preview-LQG Controller for Micromachined Tunneling Gyroscope
p.318

Two Fabrication Schematics of Silicon Micro Perforated Panel Based on MEMS Technology
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 503A High Performance Fourth-Order Single-Loop Sigma...

A High Performance Fourth-Order Single-Loop Sigma Delta Modulator Applied in Micro-Inertial Sensors

Abstract:

This paper presents a fourth-order sigma delta (ΣΔ)modulator applied in micro-inertial sensors. After a introduction of sigma-delta modulator and its application in micro-inertial sensors, the system-level analysis and design is given and the gain coefficients is calculated. By the use of root locus, the stability of high order ΣΔ modulator is analyzed and it is got the minimum value of quantizer gain k is 0.287. The simulation shows that the signal to noise ratio (SNR) is 121.6 dB and the effective number of bits (ENOB) is 19.91 bits. When input level is smaller than -6 dBFs, the quantizer and integrators would not be overload and work well.

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Periodical:

Key Engineering Materials (Volume 503)

Pages:

303-307

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.503.303

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Online since:

February 2012

Authors:

Peng Fei Wang, Yuan Yuan, Dong Bo Wang, Xiao Wei Liu, Jun'an Liu

Keywords:

Modulator, Sigma-Delta, SNR, Stability

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References

[1] D. L. DeVpe, A. P. Pisano: Surface micromachined piezoelectric accelerometers (PiXLs), IEEE J. Microelectromech. Syst, June (2001) 180 -186.

DOI: 10.1109/84.925733

Google Scholar

[2] C. Acar, C. C. Painter, A. R. Schofield: A. M. Shkel: Robust Micromachined Gyroscopes for Automotive Applications, 2005 NSTI Nanotechnology Conference and Trade Show-NSTI Nanotech 2005 Technical Proceedings, (2005)375-378.

DOI: 10.1109/icsens.2005.1597753

Google Scholar

[3] T. Ritoniemi, E. Pajarre, S. Ingalsuo: A Stereo 97dB Audio Sigma-Delta ADC, ISSCC Digest of Technical Papers, Feb (1994)198-199.

DOI: 10.1109/isscc.1994.344671

Google Scholar

[4] S. R. Norsworthy, R. Schreier,G. C. Temes, Delta-Sigma Data Converters - Theory, Design and Simulation, IEEE Press(1996), chapter 5.

DOI: 10.1109/9780470544358

Google Scholar

[5] L. B. Yao, Steyaert, W. Sansen: A 1-V 140-μW 88-dB audio sigma-delta modulator in 90-nm CMOS, IEEE Journal of Solid-State Circuits, vol39(2005)1809-1818.

DOI: 10.1109/jssc.2004.835825

Google Scholar