Two Fabrication Schematics of Silicon Micro Perforated Panel Based on MEMS Technology

Shao Hua Wu; Zhan Zhao; Li Jun Guo; Li Dong Du; Li Xiao; Zhen Fang; Jun Juan Zhao; Yun Dong Xuan

doi:10.4028/www.scientific.net/KEM.503.324

Paper Titles

A High Performance Fourth-Order Single-Loop Sigma Delta Modulator Applied in Micro-Inertial Sensors
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An In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency
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Design and Simulation for Tri-Axial Piezoresistive MEMS Accelerometer
p.312

Emulated Analysis of the Preview-LQG Controller for Micromachined Tunneling Gyroscope
p.318

Two Fabrication Schematics of Silicon Micro Perforated Panel Based on MEMS Technology
p.324

Research on the Hydrophobicity of Black Silicon Based on Virtual Process
p.329

Investigation of Silicon Lapping and Polishing Technique for Micro-Inertial Device
p.334

The Microfluid-Driven Control by Forced Wave
p.341

Analysis and Simulation of Micro-Fluidic Inertial Switch
p.348

HomeKey Engineering MaterialsKey Engineering Materials Vol. 503Two Fabrication Schematics of Silicon Micro...

Two Fabrication Schematics of Silicon Micro Perforated Panel Based on MEMS Technology

Abstract:

Two kinds of fabrication schematics of micro perforated panel (MPP) based on MEMS technology is expatiated in the article. MPP has been widely used to reduce noise, and theory reveals that better ability of sound absorption of the MPP will be getting by means of reducing the diameters and increasing the dense of the perforators properly. Small error of the dimension will decline the sound absorption seriously on such a scale. MEMS technology is applied to fabricate the micro perforated panel which is hard to be realized utilize machine. The parameters are calculated based on the theory of Maa D-Y to obtain a kind of wide band, high sound absorption structure. The computer simulation is also conducted to forecast the capability of the MPP and the experiment result shows the accordance with the simulations.

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Periodical:

Key Engineering Materials (Volume 503)

Pages:

324-328

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.503.324

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Online since:

February 2012

Authors:

Shao Hua Wu, Zhan Zhao, Li Jun Guo, Li Dong Du, Li Xiao, Zhen Fang, Jun Juan Zhao, Yun Dong Xuan

Keywords:

MEMS, Micro Perforated Panel, Noise Reduction, Resonator

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References

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