Simulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers

Yan Liu; Yu Long Zhao; Lu Sun

doi:10.4028/www.scientific.net/KEM.503.87

Paper Titles

Optimal Design of Micro Plastic Heat Radiator
p.67

A Miniaturized Piezoelectric Wind Flutter Generator
p.71

Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS
p.75

A Flush-Mounted Resonant Ice Detection Sensor with High Sensitivity
p.81

Simulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers
p.87

Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology
p.91

Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O₃ Antiferroelectric Thick Films
p.97

Heating Carve Technique for Polymer Microfluidic Microchannel
p.103

Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness
p.108

HomeKey Engineering MaterialsKey Engineering Materials Vol. 503Simulation and Analysis of Cantilever-Membrane...

Simulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers

Abstract:

Dynamic and static performances are the most important parameters for accelerometers. The natural frequency decides the sensor’s working frequency band, and the accompanying stress represents the measurement sensitivity. In this paper, a novel sensing structure, cantilever-membrane structure, for piezoresistive accelerometers is studied, in order to detect the structural dimension’s effect on the sensor. With the help of FEM (Finite element method) software, the first order natural frequency of the cantilever-membrane based accelerometer is investigated with the different combinations of membrane’s dimensions. The accompanying stress of the sensing structure is also simulated in this paper. The results show that the membrane’s dimensions affect the frequency and stress more tempestuously when the membrane is short, but the tendency become gentle when the width of the membrane increases.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Key Engineering Materials (Volume 503)

Pages:

87-90

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.503.87

Citation:

Cite this paper

Online since:

February 2012

Authors:

Yan Liu, Yu Long Zhao, Lu Sun

Keywords:

Cantilever-Membrane Structure, Finite Element Method (FEM), Micro-Accelerometer, Piezoresistive Effect

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] N. Yazdi, F. Ayazi, K. Najafi, Micromachined inertial sensors, Proceedings of the IEEE 86 (2002) 1640-1659.

DOI: 10.1109/5.704269

Google Scholar

[2] Y. Liu, Y.L. Zhao, L. Sun, Design & Fabrication of a MEMS Piezoresistive Accelerometer with Beam-Film Combined Structure, Applied Mechanics and Materials 44 (2011) 1305-1309.

DOI: 10.4028/www.scientific.net/amm.44-47.1305

Google Scholar

[3] C.S. Smith, Piezoresistance effect in germanium and silicon, Physics Review 94 (1954) 42-49.

Google Scholar

[4] M.H. Bao: Micro-mechanical Transducers, Pressure Sensors, Accelerometers and Gyroscopes, Elsevier, Amsterdam, (2000).

DOI: 10.1016/s1386-2766(00)80022-5

Google Scholar

[5] L.B. Zhao, Y.L. Zhao, Z.D. Jiang, Research on Special Piezoresistive Acceleration Sensor, Journal of Xi'an Jiaotong University 40 (2006) 1049-1052 (In Chinese).

Google Scholar