Piezoresistive Acceleration Sensor with High Sensitivity and High Responsiveness

Shintaro Kurokami; Zulfakri bin Mohamad; You Yin; Sumio Hosaka; Takahiro Fuju; Yoshiharu Sueyoshi; Haruki Okano

doi:10.4028/www.scientific.net/KEM.534.169

Paper Titles

Defect Detection in Optical Disk Substrate by Mach-Zehnder Interferometer
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Visible-Light Emission Properties of Erbium-Doped Tantalum-Oxide Films Produced by Co-Sputtering
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Fabrication of Mach-Zehnder Polymer Waveguides by a Direct-Drawing Technique Using a Focused Proton Beam
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Design and Analysis of Taper Structure for Light Coupling into Photonic Crystal Waveguides Fabricated by Si-Ion Implantation
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Piezoresistive Acceleration Sensor with High Sensitivity and High Responsiveness
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The Parameterization of All Plants Stabilized by a PID Controller
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A Study on the Class of Model Feedback Controllers Formultiple-Input/Multiple-Output Non-Minimum Phase System
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An Analytical Study on Jitter Accumulation in Interleaved Phase Frequency Detectors for High-Accuracy On-Chip Jitter Measurements
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A High Efficiency, Extended Load Range Boost Regulator Optimized Forenergy Harvesting Applications
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 534Piezoresistive Acceleration Sensor with High...

Piezoresistive Acceleration Sensor with High Sensitivity and High Responsiveness

Abstract:

In this work, a new-type piezo-resistive acceleration sensor with a slit in the beams is proposed to improve sensitivity by reducing the twisting of the beams. Experimental results demonstrated that the new-type acceleration sensor has about 3.5 times higher than that of the conventional acceleration sensor without the slit. Furthermore, resonant frequency of the new-type sensor increases to about 5 kHz by a factor of 25, compared with commercial acceleration sensor.