Visible-Light Emission Properties of Erbium-Doped Tantalum-Oxide Films Produced by Co-Sputtering

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The visible-light emission properties of erbium (Er)-doped tantalum-oxide films prepared by co-sputtering were evaluated. Photoluminescence (PL) peaks at wavelengths of 550 and 670 nm could be observed from these films by ultraviolet-laser excitation after annealing. The dependence of Er3+ concentration, annealing temperature, and annealing time on the PL peak intensities were investigated. Such light-emitting sputtered films can be useful as high-index materials of photonic crystals that can be applied to novel active devices.

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154-157

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January 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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