Defect Detection in Optical Disk Substrate by Mach-Zehnder Interferometer

Abstract:

In recent years optical disks have been very popular and in manufacturing process error detection in optical disks becomes very important, especially for the defects whose size of a few millimeters in length and several hundred nanometers in depth. The authors have developed a new system to measure the defects of disk substrates using a Mach-Zehnder interferometer with a phase shifting method. But it was found that optical disks had undulation of the optical thickness and it disturbed the detection of defects. To solve the problem moving-average method was developed and introduced in data processing to distinguish the defect from the undulation, and with modified unwrapping program the defect was visualized by binary image processing.

• Periodical: Key Engineering Materials (Volume 534)
• Pages: 149-153
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.534.149
• Online since: January 2013
• Authors: Yoshitaka Takahashi, Kazuki Morishima, Masayuki Yokota
• Keywords: Interferometer, Optical Disk, Optical Sensing, Phase Shifting Method

References

[1] Y. Takahashi, T. Oosawa, and T. Takahashi, 5th International Conference on Optics-photonics Design & Fabrication (2006), 7PS4-32.

[2] J. H. Bruning, D. R. Herriott, J. E. Gallangher, D. P. Rosenfield, A. D. White, and D. J. Brangaccio, Appl. Opt. Vol. 13 (1974), p.2693.

[3] J. C. Wyant, Appl. Opt. Vol. 14 (1975), p.2622.

[4] J. Schwider, R. Burow, K. -E. Elssner, J. Grzanna, R. Spolaczyk, and K. Merkel, Appl. Opt. Vol. 22 (1983), p.3421.

DOI: 10.1364/ao.22.003421

[5] Xiao Yuan He, Xin Kang, Cho Jui Tay, Chenggen Quan, and Huai Min Shang, Appl. Opt. Vol. 41 (2002), p.7422.