Fabrication of Mach-Zehnder Polymer Waveguides by a Direct-Drawing Technique Using a Focused Proton Beam

Kenta Miura; Takahiro Satoh; Yasuyuki Ishii; Hiromu Kiryu; Yusuke Ozawa; Masashi Kohka; Katsuyoshi Takano; Takeru Ohkubo; Akiyoshi Yamazaki; Wataru Kada; Akihito Yokoyama; Tomihiro Kamiya; Osamu Hanaizumi

doi:10.4028/www.scientific.net/KEM.534.158

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 534Fabrication of Mach-Zehnder Polymer Waveguides by...

Fabrication of Mach-Zehnder Polymer Waveguides by a Direct-Drawing Technique Using a Focused Proton Beam

Abstract:

Proton beam writing (PBW) has recently attracted much attention as a next-generation microfabrication technology. This is a direct-drawing technique and does not need any masks to transfer micropatterns to sample surfaces. In our previous work, we demonstrated the first single-mode straight-line and Y-junction PMMA-based waveguides fabricated using PBW and working at λ = 1.55 μm. In this work, we fabricated the first PMMA-based Mach-Zehnder waveguides for the wavelength utilizing PBW in order to construct thermo-optic switches.

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Periodical:

Key Engineering Materials (Volume 534)

Pages:

158-161

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.534.158

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Online since:

January 2013

Authors:

Kenta Miura, Takahiro Satoh, Yasuyuki Ishii, Hiromu Kiryu, Yusuke Ozawa, Masashi Kohka, Katsuyoshi Takano, Takeru Ohkubo, Akiyoshi Yamazaki, Wataru Kada, Akihito Yokoyama, Tomihiro Kamiya, Osamu Hanaizumi

Keywords:

Mach-Zehnder Waveguide, PMMA, Proton Beam Writing, Thermo-Optic Switch

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References

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