Research on Preparation Band-Pass Filter by Lon Beam Sputtering

Hao Long Tang; Xiu Hua Fu; Guo Jun Liu

doi:10.4028/www.scientific.net/KEM.552.152

Paper Titles

Study on Optical Property of Fabricating Free-Form Micro-Optical Element by Varying Dose Exposure Method
p.131

Small Pitch Tool for Removing Middle Spatial Frequency Errors
p.137

Ion Beam Figuring Fabricate Effect with Different Removal Sizes
p.142

Study and Fabrication of Multi-Band Filter Film on ZnS Substrate
p.147

Research on Preparation Band-Pass Filter by Lon Beam Sputtering
p.152

Symmetric Distortion Correction in Asphere Manufacturing
p.158

Study of Optical and Electrical Properties of Ag/ITO Multi-Layer Transparent Electrodes
p.162

Research on Chemical Mechanical Polishing Technology of SiC Mirror
p.168

Study on the Fabrication of RPAS Micro-Lens Array for CCD Integration
p.174

HomeKey Engineering MaterialsKey Engineering Materials Vol. 552Research on Preparation Band-Pass Filter by Lon...

Research on Preparation Band-Pass Filter by Lon Beam Sputtering

Abstract:

According to the requirement of the filter for laser tracking system, we chose Ta as the target material of high refractive index and SiO2 as the target material of low refractive index, the film system was designed and optimized with the TFCalc software, adopted the double ion sputter coaters by VEECO company for plating system, using two sides of the substrate to broaden the long and short wavelength cut-off band respectively, we improved the peak transmittance and simplified the difficulty of experimental analysis, the filter to meet the demand has been deposited. The average transmittance of the filter at 532nm, 808nm, 1064nm and1550nm wavelength was less than 0.2% and the peak transmittance at 905nm wavelength was 96.3%. The filter can withstand the test of bad environment and satisfy the requirements of the laser tracking system.

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Periodical:

Key Engineering Materials (Volume 552)

Pages:

152-157

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.552.152

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Online since:

May 2013

Authors:

Hao Long Tang, Xiu Hua Fu, Guo Jun Liu

Keywords:

Band-Pass Filter, Coating Design, Laser Tracking System, Lon Beam Sputtering Technique

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